Tuneable electrical properties of hafnium aluminate gate dielectrics deposited by metal organic chemical vapour deposition

Microelectronics Reliability ◽

10.1016/j.microrel.2007.01.052 ◽

2007 ◽

Vol 47 (4-5) ◽

pp. 722-725 ◽

Author(s):

Y. Lu ◽

O. Buiu ◽

S. Hall ◽

I.Z. Mitrovic ◽

W. Davey ◽

...

Keyword(s):

Electrical Properties ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Gate Dielectrics ◽

Chemical Vapour ◽

Organic Chemical ◽

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The influence of indium surfactant on the electrical properties of GaN epilayers grown by metal-organic chemical vapour deposition

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/43/14/145402 ◽

2010 ◽

Vol 43 (14) ◽

pp. 145402

Author(s):

J Song ◽

F J Xu ◽

Z L Miao ◽

S Huang ◽

Y Wang ◽

...

Keyword(s):

Electrical Properties ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Organic Chemical ◽

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Surface, structural and electrical properties of BaTiO3 films grown on p-Si substrates by low pressure metal organic chemical vapour deposition

Journal of Materials Science ◽

10.1007/bf00351872 ◽

1995 ◽

Vol 30 (14) ◽

pp. 3603-3606 ◽

Author(s):

Y. S. Yoon ◽

S. S. Yom ◽

T. W. Kim ◽

H. J. Kim ◽

M. Jung ◽

...

Keyword(s):

Electrical Properties ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Low Pressure ◽

Organic Chemical ◽

Si Substrates ◽

Structural And Electrical Properties ◽

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Effects of indium flow rate on the structural, morphological, optical and electrical properties of InGaN layers grown by metal organic chemical vapour deposition

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2019.151803 ◽

2019 ◽

Vol 811 ◽

pp. 151803

Author(s):

K. Prabakaran ◽

R. Ramesh ◽

P. Arivazhagan ◽

M. Jayasakthi ◽

S. Sanjay ◽

...

Keyword(s):

Electrical Properties ◽

Chemical Vapour Deposition ◽

Flow Rate ◽

Vapour Deposition ◽

Chemical Vapour ◽

Organic Chemical ◽

Optical And Electrical Properties ◽

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Optical and electrical properties of the disordered composite semiconductor (GaAs)1−x (SiC2 : H)x, grown by metal-organic chemical vapour deposition

Philosophical Magazine B ◽

10.1080/13642818608240658 ◽

1986 ◽

Vol 53 (5) ◽

pp. 445-457 ◽

Author(s):

F. Maury ◽

G. Constant ◽

D. Jousse ◽

A. Deneuville

Keyword(s):

Electrical Properties ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Organic Chemical ◽

Optical And Electrical Properties ◽

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Metal Organic Chemical Vapour Deposition of Vertically Aligned ZnO Nanowires Using Oxygen Donor Adducts

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2011.5038 ◽

2011 ◽

Vol 11 (9) ◽

pp. 8294-8301 ◽

Author(s):

S. Hindley ◽

A. C. Jones ◽

S. Ashraf ◽

J. Bacsa ◽

A. Steiner ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Zno Nanowires ◽

Organic Chemical ◽

Oxygen Donor ◽

Metal Organic ◽

Vertically Aligned

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Characterization of thin superconducting films prepared by metal-organic chemical vapour deposition

Materials Science and Engineering B ◽

10.1016/0921-5107(92)90326-5 ◽

1992 ◽

Vol 14 (1) ◽

pp. 43-45 ◽

Author(s):

K. Fröhlich ◽

J. Šouc ◽

D. Machajdík ◽

I. Vávra

Keyword(s):

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Superconducting Films ◽

Organic Chemical ◽

Metal Organic ◽

Thin Superconducting Films

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Infrared spectroscopic and X-ray diffraction characterization of iron disulphide thin films prepared by metal-organic chemical vapour deposition

Journal of Materials Science Letters ◽

10.1007/bf00730854 ◽

1992 ◽

Vol 11 (16) ◽

pp. 1131-1133 ◽

Author(s):

A. Ennaoui ◽

S. Schroetter ◽

S. Fiechter ◽

H. Tributsch

Keyword(s):

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Organic Chemical ◽

X Ray Diffraction ◽

X Ray ◽

Infrared Spectroscopic ◽

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Nucleation and growth study of copper thin films on different substrates and wetting layers by metal-organic chemical vapour deposition

Bulletin of Materials Science ◽

10.1007/bf02745282 ◽

1995 ◽

Vol 18 (7) ◽

pp. 901-910 ◽

Author(s):

A Dutta ◽

J Goswami ◽

S A Shivashankar

Keyword(s):

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Nucleation And Growth ◽

Organic Chemical ◽

Growth Study ◽

Metal Organic ◽

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Growth and characterization of germanium epitaxial film on silicon (001) with germane precursor in metal organic chemical vapour deposition (MOCVD) chamber

AIP Advances ◽

10.1063/1.4822424 ◽

2013 ◽

Vol 3 (9) ◽

pp. 092123 ◽

Author(s):

Kwang Hong Lee ◽

Adam Jandl ◽

Yew Heng Tan ◽

Eugene A. Fitzgerald ◽

Chuan Seng Tan

Keyword(s):

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Epitaxial Film ◽

Chemical Vapour ◽

Organic Chemical ◽

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Vapour-pressure data for adducts of dimethylzinc: sources and dopants for zinc in metal–organic chemical vapour deposition

Journal of Materials Chemistry ◽

10.1039/jm9930300739 ◽

1993 ◽

Vol 3 (7) ◽

pp. 739-742 ◽

Author(s):

Paul O'Brien ◽

John R. Walsh ◽

Anthony C. Jones ◽

Simon A. Rushworth ◽

Clive Meaton

Keyword(s):

Chemical Vapour Deposition ◽

Vapour Pressure ◽

Vapour Deposition ◽

Chemical Vapour ◽

Organic Chemical ◽

Pressure Data ◽

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