A study of material stoichiometry on charging properties of SiNx films for potential application in RF MEMS capacitive switches

2020 ◽  
Vol 114 ◽  
pp. 113759
Author(s):  
M. Koutsoureli ◽  
D. Birmpiliotis ◽  
G. Papaioannou
Keyword(s):  
Potential Application ◽  
Rf Mems ◽  
Capacitive Switches

A comparative study of nanostructured Silicon-Nitride electrical properties for potential application in RF-MEMS capacitive switches

2019 ◽  
Vol 100-101 ◽  
pp. 113360 ◽  
Author(s):  
D. Birmpiliotis ◽  
G. Stavrinidis ◽  
M. Koutsoureli ◽  
G. Konstantinidis ◽  
G. Papaioannou ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Electrical Properties ◽  
Comparative Study ◽  
Potential Application ◽  
Rf Mems ◽  
Capacitive Switches ◽  
Nanostructured Silicon

Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys

2007 ◽  
Vol 135 (1) ◽  
pp. 262-272 ◽  
Author(s):  
Cari F. Herrmann ◽  
Frank W. DelRio ◽  
David C. Miller ◽  
Steven M. George ◽  
Victor M. Bright ◽  
...  
Keyword(s):  
Rf Mems ◽  
Atomic Layer ◽  
Dielectric Films ◽  
Capacitive Switches

Performance of low-loss RF MEMS capacitive switches

1998 ◽  
Vol 8 (8) ◽  
pp. 269-271 ◽  
Author(s):  
C.L. Goldsmith ◽  
Zhimin Yao ◽  
S. Eshelman ◽  
D. Denniston
Keyword(s):  
Rf Mems ◽  
Capacitive Switches ◽  
Low Loss

Understanding and improving longevity in RF MEMS capacitive switches

2008 ◽  
Author(s):  
Chuck Goldsmith ◽  
David Forehand ◽  
Derek Scarbrough ◽  
Zheng Peng ◽  
Cris Palego ◽  
...  
Keyword(s):  
Rf Mems ◽  
Capacitive Switches
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