High aspect ratio anisotropic silicon etching for x-ray phase contrast imaging grating fabrication

Grating-based X-ray phase contrast imaging is promising especially in the medical area. Two or three gratings are involved in grating-based X-ray phase contrast imaging in which the absorption grating of high-aspect-ratio is the most important device and the fabrication process is a great challenge. The material with large atomic number Z is used to fabricate the absorption grating for excellent absorption of X-ray, and Au is usually used. The fabrication process, which involves X-ray lithography, development and gold electroplating, is described in this paper. The absorption gratings with 4 [Formula: see text]m period and about 100 [Formula: see text]m height are fabricated and the high-aspect-ratio is 50.

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Double sided grating fabrication for high energy X-ray phase contrast imaging

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2018.04.016 ◽

2019 ◽

Vol 92 ◽

pp. 86-90 ◽

Cited By ~ 3

Author(s):

Andrew E. Hollowell ◽

Christian L. Arrington ◽

Patrick Finnegan ◽

Kate Musick ◽

Paul Resnick ◽

...

Keyword(s):

Phase Contrast ◽

High Energy ◽

Phase Contrast Imaging ◽

Contrast Imaging ◽

X Ray ◽

Grating Fabrication

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Commentary: Is X-ray Phase Contrast Imaging an Anatomical Klondike for Surgeons?

Seminars in Thoracic and Cardiovascular Surgery ◽

10.1053/j.semtcvs.2020.04.011 ◽

2020 ◽

Vol 32 (4) ◽

pp. 969-970

Author(s):

Sergio A. Carrillo

Keyword(s):

Phase Contrast ◽

Phase Contrast Imaging ◽

Contrast Imaging ◽

X Ray

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Image Quality Analysis of X-ray Grating Interferometer Using Integrating-bucket Method

Journal of Imaging Science and Technology ◽

10.2352/j.imagingsci.technol.2020.64.2.020503 ◽

2020 ◽

Vol 64 (2) ◽

pp. 20503-1-20503-5

Author(s):

Faiz Wali ◽

Shenghao Wang ◽

Ji Li ◽

Jianheng Huang ◽

Yaohu Lei ◽

...

Keyword(s):

Image Quality ◽

Phase Contrast ◽

Quality Analysis ◽

Phase Contrast Imaging ◽

Phase Image ◽

Contrast Imaging ◽

High Quality ◽

Image Quality Analysis ◽

X Ray ◽

Grating Interferometer

Abstract Grating-based x-ray phase-contrast imaging has the potential to enhance image quality and provide inner structure details non-destructively. In this work, using grating-based x-ray phase-contrast imaging system and employing integrating-bucket method, the quantitative expressions of signal-to-noise ratios due to photon statistics and mechanical error are analyzed in detail. Photon statistical noise and mechanical error are the main sources affecting the image noise in x-ray grating interferometry. Integrating-bucket method is a new phase extraction method translated to x-ray grating interferometry; hence, its image quality analysis would be of great importance to get high-quality phase image. The authors’ conclusions provide an alternate method to get high-quality refraction signal using grating interferometer, and hence increases applicability of grating interferometry in preclinical and clinical usage.

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