Numerical computation of discrete differential scattering cross sections for Monte Carlo charged particle transport

2015 ◽  
Vol 295 ◽  
pp. 674-678
Author(s):  
Jonathan A. Walsh ◽  
Todd S. Palmer ◽  
Todd J. Urbatsch
Keyword(s):  
Monte Carlo ◽  
Charged Particle ◽  
Numerical Computation ◽  
Cross Sections ◽  
Particle Transport ◽  
Scattering Cross ◽  
Charged Particle Transport ◽  
Scattering Cross Sections

The calculation of backscattered images for cross-section samples in the scanning electron microscope (SEM)

1992 ◽  
Vol 50 (2) ◽  
pp. 1312-1313
Author(s):  
T.D. Ly ◽  
D.G Howitt
Keyword(s):  
Monte Carlo ◽  
Cross Sections ◽  
Monte Carlo Techniques ◽  
Scattering Cross ◽  
Heterogeneous Samples ◽  
Composition Profiles ◽  
Image Position ◽  
Scattering Cross Sections ◽  
Image Simulations ◽  
Signal Intensities

The calculation of image contrast in heterogeneous samples can be done using Monte Carlo techniques if the electron trajectories can be calculated through the composition profiles in the specimen. Most of the programs that are available are designed to calculate signal intensities from samples of uniform atomic number and density (e.g Joy 1988, Reimer and Steltzer 1987) but some success has been achieved in the description of samples with distinct composition profiles by extrapolating these results.The image simulations we have done here are based upon Monte Carlo calculations of the electron backscattered signal from samples where the composition variations can be taken into account in determining both the elastic and inelastic scattering cross sections. This work involved extending the program developed by Joy (1988) and comparing the calculated signal intensities to the values derived experimentally from a specimen of well defined geometry. In the program the elastic scattering cross-sections, which describe the collisions of the electrons with the atomic nucleus are described by a Rutherford model given by(1)

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