A beam homogenizer for digital micromirror device lithography system based on random freeform microlenses

2019 ◽  
Vol 443 ◽  
pp. 211-215 ◽  
Author(s):  
Zhongyuan Liu ◽  
Hua Liu ◽  
Zifeng Lu ◽  
Qiankun Li ◽  
Jinhuan Li
Optik ◽  
2019 ◽  
Vol 185 ◽  
pp. 1036-1044 ◽  
Author(s):  
Chao Peng ◽  
Zezhou Zhang ◽  
Jianxiao Zou ◽  
Wenming Chi

2014 ◽  
Vol 15 (7) ◽  
pp. 1417-1422 ◽  
Author(s):  
Yong-Kyu Cho ◽  
Tae-Heon Han ◽  
Seok-Jae Ha ◽  
Jung-Won Lee ◽  
Jong-Su Kim ◽  
...  

1994 ◽  
Vol 22 (11) ◽  
pp. 935-942
Author(s):  
Hiroshi ITO ◽  
Takashi OBARA

2020 ◽  
Vol 134 ◽  
pp. 106122
Author(s):  
Jadze Princeton C. Narag ◽  
Niña Angelica F. Zambale ◽  
Nathaniel Hermosa

Micromachines ◽  
2019 ◽  
Vol 10 (2) ◽  
pp. 149 ◽  
Author(s):  
Zifeng Lu ◽  
Jinghang Zhang ◽  
Hua Liu ◽  
Jialin Xu ◽  
Jinhuan Li

In the Hadamard transform (HT) near-infrared (NIR) spectrometer, there are defects that can create a nonuniform distribution of spectral energy, significantly influencing the absorbance of the whole spectrum, generating stray light, and making the signal-to-noise ratio (SNR) of the spectrum inconsistent. To address this issue and improve the performance of the digital micromirror device (DMD) Hadamard transform near-infrared spectrometer, a split waveband scan mode is proposed to mitigate the impact of the stray light, and a new Hadamard mask of variable-width stripes is put forward to improve the SNR of the spectrometer. The results of the simulations and experiments indicate that by the new scan mode and Hadamard mask, the influence of stray light is restrained and reduced. In addition, the SNR of the spectrometer also is increased.


2019 ◽  
Vol 125 (2) ◽  
Author(s):  
Jinliang Li ◽  
Xiao Chen ◽  
Min Lv ◽  
Yunshu Gao ◽  
Genxiang Chen

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