High-accuracy spectral interferometer with multi-Fabry–Perot Etalon for thickness measurement of the silicon wafer

2021 ◽  
pp. 127346
Author(s):  
Meiyun Chen ◽  
Shuiling Pang ◽  
Jinglun Zhou ◽  
Heng Wu ◽  
Matsumoto Hirokazu ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Thickness Measurement ◽  
High Accuracy ◽  
Fabry Perot

High-Accuracy Real Time Calibration of Tunable Fabry-Pérot Filter on Large Range

2008 ◽  
Vol 28 (5) ◽  
pp. 852-855
Author(s):  
乔学光 Qiao Xueguang ◽  
王瑜 Wang Yu ◽  
傅海威 Fu Haiwei ◽  
赵大壮 Zhao Dazhuang ◽  
王炜 Wang Wei ◽  
...  
Keyword(s):  
Real Time ◽  
Large Range ◽  
High Accuracy ◽  
Time Calibration ◽  
Fabry Perot

scholarly journals Noncontact Thickness Measurement of Cu Film on Silicon Wafer Using Magnetic Resonance Coupling for Stress Free Polishing Application

IEEE Access ◽  
2019 ◽  
Vol 7 ◽  
pp. 75330-75341 ◽  
Author(s):  
Zilian Qu ◽  
Wensong Wang ◽  
Shuhui Yang ◽  
Quqin Sun ◽  
Zhongyuan Fang ◽  
...  
Keyword(s):  
Magnetic Resonance ◽  
Silicon Wafer ◽  
Thickness Measurement ◽  
Cu Film ◽  
Magnetic Resonance Coupling ◽  
Resonance Coupling

Aerosol Optical Thickness Measurement with Elevation-Scanning Lidar

2015 ◽  
Vol 32 (7) ◽  
pp. 1364-1371
Author(s):  
Pavel I. Ionov ◽  
Andrew K. Mollner
Keyword(s):  
Optical Thickness ◽  
Thickness Measurement ◽  
High Accuracy ◽  
Sufficient Accuracy ◽  
Aerosol Optical Thickness ◽  
Calibration Standards ◽  
Accuracy Measurement ◽  
Scanning Lidar ◽  
Sun Photometer ◽  
High Accuracy Measurement

AbstractHigh-accuracy measurement of aerosol optical thickness (AOT) τa with an elevation-scanning lidar is demonstrated and the results are compared with a collocated Cimel 318 sun photometer. Linear regression of the time-coincident data from a 2-week measurement campaign with the two instruments is found to be τalidar = (1.00 ± 0.17)τaphot + (0.025 ± 0.019) (1σ). The method proved to have sufficient accuracy to measure AOTs of 0.1–0.2 commonly seen in relatively clear atmosphere. The measurement is absolute and thus does not depend on any external calibration standards.

High accuracy CO2 measurement system based on Fabry-Perot interferometer

2003 ◽  
Author(s):  
Elena M. Georgieva ◽  
Emily L. Wilson ◽  
Mariusz J. Miodek ◽  
William S. Heaps
Keyword(s):  
Measurement System ◽  
High Accuracy ◽  
Fabry Perot

High-accuracy vibration sensor based on a Fabry–Perot interferometer with active phase-tracking technology

2018 ◽  
Vol 57 (4) ◽  
pp. 659 ◽  
Author(s):  
Wei Xia ◽  
Chuncheng Li ◽  
Hui Hao ◽  
Yiping Wang ◽  
Xiaoqi Ni ◽  
...  
Keyword(s):  
Active Phase ◽  
High Accuracy ◽  
Vibration Sensor ◽  
Phase Tracking ◽  
Fabry Perot ◽  
Tracking Technology

scholarly journals Comprehensive Temperature Control of a Hot Metal Rolling Thickness Measurement System

2020 ◽  
Vol 15 ◽  
Keyword(s):  
High Precision ◽  
Temperature Control ◽  
Measurement System ◽  
Thermal Stabilization ◽  
Thickness Measurement ◽  
High Accuracy ◽  
Hot Metal ◽  
Metallurgical Production ◽  
Precision System ◽  
Thickness Measurement System

The work is devoted to the development of integrated thermostating subsystem of a high-precision system for measuring the thickness of hot metal rolling. The developed thermostatting subsystem includes active and passive modules, which ensured thermostability of the measuring modules at the level of 0.5 degrees in a hot metallurgical workshop. Thermal stabilization made it possible to ensure high accuracy in measuring the thickness of hot metal rolling in a hot metallurgical production workshop.

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