Development of a fast atom beam gun for surface-activated bonding

Precision Engineering ◽

10.1016/j.precisioneng.2019.11.006 ◽

2020 ◽

Vol 62 ◽

pp. 106-112

Author(s):

Ryo Morisaki ◽

Yuuki Hirai ◽

Chiemi Oka ◽

Mizue Mizoshiri ◽

Takahiro Yamazaki ◽

...

Keyword(s):

Atom Beam ◽

Download Full-text

Characterization of bonding interface prepared by room-temperature Si wafer direct bonding using the surface smoothing effect of a Ne fast atom beam

Microelectronic Engineering ◽

10.1016/j.mee.2014.01.005 ◽

2014 ◽

Vol 118 ◽

pp. 1-5 ◽

Author(s):

Yuichi Kurashima ◽

Atsuhiko Maeda ◽

Hideki Takagi

Keyword(s):

Room Temperature ◽

Bonding Interface ◽

Smoothing Effect ◽

Surface Smoothing ◽

Atom Beam ◽

Fast Atom Beam ◽

Wafer Direct Bonding ◽

Download Full-text

Laser-Sustained Plasma in a Sonic Nozzle Probed by Fast Atom Beam

Journal of Thermophysics and Heat Transfer ◽

10.2514/1.29306 ◽

2007 ◽

Vol 21 (4) ◽

pp. 763-771 ◽

Author(s):

K. Amic ◽

A. Lebéhot ◽

J. D. Parisse

Keyword(s):

Atom Beam ◽

Sonic Nozzle ◽

Download Full-text

Fast atom beam bombardment secondary ion mass spectrometry: FAB-SIMS

Applied Surface Science ◽

10.1016/0169-4332(93)90443-f ◽

1993 ◽

Vol 70-71 ◽

pp. 287-290 ◽

Author(s):

Hideaki Hayashi ◽

Tohru Satake ◽

Kazuhiko Kaneko ◽

Kazutosi Nagai

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Atom Beam ◽

Ion Mass Spectrometry ◽

Fast Atom Beam ◽

Download Full-text

Fast atom beam-based fabrication of high-efficienct blazed grating using slanting angle control of a substrate

2010 International Conference on Optical MEMS and Nanophotonics ◽

10.1109/omems.2010.5672141 ◽

2010 ◽

Author(s):

ChaBum Lee ◽

Kazuhiro Hane ◽

Sun-Kyu Lee

Keyword(s):

Atom Beam ◽

Blazed Grating ◽

Download Full-text

Spectrally Selective Emitters with Deep Rectangular Cavities Fabricated with Fast Atom Beam Etching

10.1063/1.1539373 ◽

2003 ◽

Author(s):

Hitoshi Sai

Keyword(s):

Atom Beam ◽

Spectrally Selective ◽

Fast Atom Beam ◽

Selective Emitters ◽

Fast Atom Beam Etching

Download Full-text

Electron field-emission from diamond-like carbon films grown by a saddle field fast atom beam source

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1598977 ◽

2003 ◽

Vol 21 (5) ◽

pp. 1986 ◽

Author(s):

O. S. Panwar ◽

Rajnish Sharma ◽

Sushil Kumar ◽

P. N. Dixit

Keyword(s):

Field Emission ◽

Carbon Films ◽

Diamond Like Carbon ◽

Electron Field Emission ◽

Atom Beam ◽

Beam Source ◽

Electron Field ◽

Download Full-text

The optical and mechanical properties of carbon films grown using a fast atom beam source

Surface and Coatings Technology ◽

10.1016/0257-8972(91)90345-w ◽

1991 ◽

Vol 47 (1-3) ◽

pp. 722-729 ◽

Author(s):

A. Dehbi-Alaoui ◽

A. Matthews ◽

J. Franks

Keyword(s):

Mechanical Properties ◽

Carbon Films ◽

Atom Beam ◽

Beam Source ◽

Fast Atom Beam ◽

Optical And Mechanical Properties

Download Full-text

Freestanding HfO2 grating fabricated by fast atom beam etching

Nanoscale Research Letters ◽

10.1186/1556-276x-6-367 ◽

2011 ◽

Vol 6 (1) ◽

Author(s):

Yongjin Wang ◽

Tong Wu ◽

Yoshiaki Kanamori ◽

Kazuhiro Hane

Keyword(s):

Atom Beam ◽

Fast Atom Beam ◽

Fast Atom Beam Etching

Download Full-text

Subwavelength antireflection gratings for light emitting diodes and photodiodes fabricated by fast atom beam etching

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) ◽

10.1109/imnc.2001.984158 ◽

2002 ◽

Author(s):

M. Ishimori ◽

Y. Kanamori ◽

M. Sasaki ◽

K. Hane

Keyword(s):

Light Emitting Diodes ◽

Atom Beam ◽

Light Emitting ◽

Fast Atom Beam ◽

Fast Atom Beam Etching

Download Full-text

Characterization of a saddle field fast atom beam source

Vacuum ◽

10.1016/0042-207x(88)90607-0 ◽

1988 ◽

Vol 38 (2) ◽

pp. 111-115 ◽

Author(s):

SO Saied ◽

JL Sullivan ◽

RK Fitch

Keyword(s):

Atom Beam ◽

Beam Source ◽

Download Full-text