Design and precision tracking control of a high-bandwidth fast steering mirror for laser beam machining
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2019 ◽
Vol 356
(10)
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pp. 5104-5121
2001 ◽
Vol 67
(656)
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pp. 1046-1052
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2005 ◽
Vol 28
(1)
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pp. 30-35
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2015 ◽
Vol 40
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pp. 151-159
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2002 ◽
Vol 394-395
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pp. 83-86
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