High Resolution Nano-gap Pirani Sensor for Pressure Measurement in Wide Dynamic Range Operation Around Atmospheric Pressure
2016 ◽
Vol 168
◽
pp. 798-801
◽
Julien Claudel
◽
Cecile Ghouila-Houri
◽
Jean-Claude Gerbedoen
◽
Quentin Gallas
◽
Eric Garnier
◽
...
2013 ◽
Vol 31
(19)
◽
pp. 3176-3180
◽
Atsushi Wada
◽
Keisuke Ikuma
◽
Masakatsu Syoji
◽
Satoshi Tanaka
◽
Nobuaki Takahashi
2006 ◽
Vol 560
(2)
◽
pp. 517-523
◽
Luigi Bardelli
◽
Giacomo Poggi
2015 ◽
Vol 23
(21)
◽
pp. 27960
◽
S. R. Sandoghchi
◽
M. Petrovich
◽
D. R. Gray
◽
Y. Chen
◽
N. V. Wheeler
◽
...
Mino Kim
◽
Woo-Yeol Shin
◽
Gi-Moon Hong
◽
Jihwan Park
◽
Joo-Hyung Chae
◽
...
Park Hays
◽
Matthew J. Kagie
◽
David B. Karelitz
◽
Randolph "Rex" Kay
◽
John Steven Mincey
◽
...
Alvin G. Stern
◽
Daniel C. Cole
S. Shinohara
◽
M. Andou
◽
M. Miyata
◽
H. Yoshida
◽
H. Ikeda
◽
...
2014 ◽
Vol 53
(15)
◽
pp. 3341
◽
2019 ◽
Vol 134
◽
pp. 820-824
◽
Huanqin Wang
◽
Juntao Hu
◽
Wei Wan
◽
Huaqiao Gui
◽
Feihu Qin
◽
...