Mechanical and electrical characterization of quartz tuning fork force sensors

2015 ◽  
Vol 223 ◽  
pp. 167-173 ◽  
Author(s):  
Bakir Babic ◽  
Magnus T.L. Hsu ◽  
Malcolm B. Gray ◽  
Mingzhen Lu ◽  
Jan Herrmann
2015 ◽  
Vol 29 (8) ◽  
pp. 3091-3096 ◽  
Author(s):  
Zhouqiang Zhang ◽  
Shuhai Jia ◽  
Binshan Ma ◽  
Hualing Chen ◽  
Yuan Wei

2009 ◽  
Vol 20 (21) ◽  
pp. 215502 ◽  
Author(s):  
A Castellanos-Gomez ◽  
N Agraït ◽  
G Rubio-Bollinger

2010 ◽  
Vol 81 (6) ◽  
pp. 063706 ◽  
Author(s):  
Terunobu Akiyama ◽  
Nicolaas F. de Rooij ◽  
Urs Staufer ◽  
Manfred Detterbeck ◽  
Dominik Braendlin ◽  
...  

2014 ◽  
Vol 530-531 ◽  
pp. 79-82
Author(s):  
Chang Fu Li ◽  
Jing Ma ◽  
Fang He

This paper presents the design, fabrication and characterization of quartz tuning fork temperature sensor which is based on new ZY-cut-quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor has been conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor cause by an external temperature. The sensor prototype was successfully fabricated and calibrated from operating from 0°C to 100°C with sensitivity of 70ppm/°C. Experimental results show the sensor has high thermal sensitivity, good stability and well reproducibility. This work represents high precision and low power temperature sensor using the comprehensive thermal characterization of ZY-cut-quartz tuning fork resonator.


2002 ◽  
Vol 73 (7) ◽  
pp. 2713-2716 ◽  
Author(s):  
C. H. Yang ◽  
T. H. Chang ◽  
M. J. Yang ◽  
W. J. Moore

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