Deposition of ZnO thin films by RF&DC magnetron sputtering on silicon and porous-silicon substrates for pyroelectric applications

2017 ◽  
Vol 260 ◽  
pp. 24-28 ◽  
Author(s):  
K. Cicek ◽  
T. Karacali ◽  
H. Efeoglu ◽  
B. Cakmak
Keyword(s):  
Thin Films ◽  
Porous Silicon ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Silicon Substrates ◽  
Dc Magnetron Sputtering

Preparing transparent cobalt-doped ZnO thin films by DC magnetron sputtering

2017 ◽  
Vol 4 (5) ◽  
pp. 6311-6316 ◽  
Author(s):  
Pongladda Panyajirawut ◽  
Nattha Pratumsuwan ◽  
Kornkamon Meesombad ◽  
Kridsana Thanawattana ◽  
Artit Chingsungnoen ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Doped Zno

Comparing the performance of transparent, conductive ZnO/Ag/ZnO thin films that have an interlayer coating formed by either DC magnetron sputtering or HiPIMS

2019 ◽  
Vol 6 (12) ◽  
pp. 126410
Author(s):  
Anthika Lakhonchai ◽  
Artit Chingsungnoen ◽  
Phitsanu Poolcharuansin ◽  
Nitisak Pasaja ◽  
Mati Horprathum ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering

A study of amorphous and crystalline phases in In2O3–10 wt.% ZnO thin films deposited by DC magnetron sputtering

2006 ◽  
Vol 496 (1) ◽  
pp. 89-94 ◽  
Author(s):  
Burag Yaglioglu ◽  
Yen-Jung Huang ◽  
Hyo-Young Yeom ◽  
David C. Paine
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Crystalline Phases

Growth of transparent conducting nano-structured In doped ZnO thin films by pulsed DC magnetron sputtering

2008 ◽  
Vol 254 (8) ◽  
pp. 2250-2254 ◽  
Author(s):  
Young Ran Park ◽  
Eung Kwon Kim ◽  
Donggeun Jung ◽  
Tae Seok Park ◽  
Young Sung Kim
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Transparent Conducting ◽  
Pulsed Dc ◽  
Doped Zno ◽  
Pulsed Dc Magnetron Sputtering
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