Photocatalytic regeneration of interdigitated capacitor relative humidity sensors fabricated by glancing angle deposition

2008 ◽  
Vol 134 (2) ◽  
pp. 666-671 ◽  
Author(s):  
Michael T. Taschuk ◽  
John J. Steele ◽  
Andy C. van Popta ◽  
Michael J. Brett
Keyword(s):  
Relative Humidity ◽  
Glancing Angle Deposition ◽  
Humidity Sensors ◽  
Glancing Angle ◽  
Angle Deposition

Ion-Beam Assisted Glancing Angle Deposition for Relative Humidity Sensors

2008 ◽  
Vol 8 (9) ◽  
pp. 1521-1522 ◽  
Author(s):  
Michael T. Taschuk ◽  
Jason B. Sorge ◽  
John J. Steele ◽  
Michael J. Brett
Keyword(s):  
Relative Humidity ◽  
Ion Beam ◽  
Glancing Angle Deposition ◽  
Humidity Sensors ◽  
Glancing Angle ◽  
Angle Deposition

Performance and Modeling of a Nanostructured Relative Humidity Sensor

2007 ◽  
Vol 1054 ◽  
Author(s):  
Mike Taschuk ◽  
John Steele ◽  
Mike Brett
Keyword(s):  
Dielectric Constant ◽  
Relative Humidity ◽  
Humidity Sensor ◽  
Large Change ◽  
Glancing Angle Deposition ◽  
Dielectric Constants ◽  
Tio2 Thin Films ◽  
Humidity Sensors ◽  
Glancing Angle ◽  
Angle Deposition

ABSTRACTCapacitive humidity sensors were fabricated using interdigitated electrodes coated with amorphous nanostructured TiO2 thin films grown by glancing angle deposition. The sensor exhibited a large change in capacitance, increasing exponentially from ∼ 1 nF to ∼ 1 μF for an increase in relative humidity from 2 % to 92 %. A simple model of the capacitive response and dielectric constant of the devices has been developed and compared to the experimental results. From this comparison, it is clear that the magnitude of the device response observed cannot be explained with bulk dielectric constants or literature values.

Nanostructured Oxide Films for High-Speed Humidity Sensors

2003 ◽  
Vol 788 ◽  
Author(s):  
John J. Steele ◽  
Kenneth D. Harris ◽  
Michael J. Brett
Keyword(s):  
Thin Film ◽  
High Speed ◽  
Response Times ◽  
Glancing Angle Deposition ◽  
Multiple Response ◽  
Humidity Sensors ◽  
Advanced Technique ◽  
Glancing Angle ◽  
Nanostructured Oxide ◽  
Angle Deposition

ABSTRACTMiniaturized thin film humidity sensors were fabricated using nanostructured materials deposited by an advanced technique known as glancing angle deposition (GLAD). These sensors exhibited extremely fast desorption response times of less than 40 ms to steplike changes in humidity. Multiple response time measurements for various initial humidities have shown that the sensors maintain their rapid response at all levels of humidity.

Photo‐Induced Self‐Cleaning and Wettability in TiO 2 Nanocolumn Arrays Obtained by Glancing‐Angle Deposition with Sputtering

2021 ◽  
pp. 2100071
Author(s):  
Fernando Fresno ◽  
María U. González ◽  
Lidia Martínez ◽  
Marcial Fernández‐Castro ◽  
Mariam Barawi ◽  
...  
Keyword(s):  
Glancing Angle Deposition ◽  
Glancing Angle ◽  
Self Cleaning ◽  
Angle Deposition

Effects of annealing on arrays of Ge nanocolumns formed by glancing angle deposition

2012 ◽  
Vol 258 (24) ◽  
pp. 9762-9769 ◽  
Author(s):  
C. Khare ◽  
J.W. Gerlach ◽  
T. Höche ◽  
B. Fuhrmann ◽  
H.S. Leipner ◽  
...  
Keyword(s):  
Glancing Angle Deposition ◽  
Glancing Angle ◽  
Angle Deposition
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