Ion-Beam Assisted Glancing Angle Deposition for Relative Humidity Sensors

2008 ◽  
Vol 8 (9) ◽  
pp. 1521-1522 ◽  
Author(s):  
Michael T. Taschuk ◽  
Jason B. Sorge ◽  
John J. Steele ◽  
Michael J. Brett
Keyword(s):  
Relative Humidity ◽  
Ion Beam ◽  
Glancing Angle Deposition ◽  
Humidity Sensors ◽  
Glancing Angle ◽  
Angle Deposition

Performance and Modeling of a Nanostructured Relative Humidity Sensor

2007 ◽  
Vol 1054 ◽  
Author(s):  
Mike Taschuk ◽  
John Steele ◽  
Mike Brett
Keyword(s):  
Dielectric Constant ◽  
Relative Humidity ◽  
Humidity Sensor ◽  
Large Change ◽  
Glancing Angle Deposition ◽  
Dielectric Constants ◽  
Tio2 Thin Films ◽  
Humidity Sensors ◽  
Glancing Angle ◽  
Angle Deposition

ABSTRACTCapacitive humidity sensors were fabricated using interdigitated electrodes coated with amorphous nanostructured TiO2 thin films grown by glancing angle deposition. The sensor exhibited a large change in capacitance, increasing exponentially from ∼ 1 nF to ∼ 1 μF for an increase in relative humidity from 2 % to 92 %. A simple model of the capacitive response and dielectric constant of the devices has been developed and compared to the experimental results. From this comparison, it is clear that the magnitude of the device response observed cannot be explained with bulk dielectric constants or literature values.

Nanostructured Oxide Films for High-Speed Humidity Sensors

2003 ◽  
Vol 788 ◽  
Author(s):  
John J. Steele ◽  
Kenneth D. Harris ◽  
Michael J. Brett
Keyword(s):  
Thin Film ◽  
High Speed ◽  
Response Times ◽  
Glancing Angle Deposition ◽  
Multiple Response ◽  
Humidity Sensors ◽  
Advanced Technique ◽  
Glancing Angle ◽  
Nanostructured Oxide ◽  
Angle Deposition

ABSTRACTMiniaturized thin film humidity sensors were fabricated using nanostructured materials deposited by an advanced technique known as glancing angle deposition (GLAD). These sensors exhibited extremely fast desorption response times of less than 40 ms to steplike changes in humidity. Multiple response time measurements for various initial humidities have shown that the sensors maintain their rapid response at all levels of humidity.

scholarly journals Three-dimensional structural comparison of tantalum glancing angle deposition thin films by FIB-SEM

2019 ◽  
Vol 8 (2) ◽  
pp. 305-315
Author(s):  
Tobias Ott ◽  
Diego Roldán ◽  
Claudia Redenbach ◽  
Katja Schladitz ◽  
Michael Godehardt ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Glancing Angle Deposition ◽  
Infrared Sensors ◽  
Geometric Information ◽  
Tantalum Films ◽  
Glancing Angle ◽  
Nano Rods ◽  
Angle Deposition

Abstract. Thin tantalum films generated by glancing angle deposition serve as functional optical layers, for instance as absorption layers for ultrathin infrared sensors. They consist of nano-rods whose dimensions and distribution influence the optical properties of the thin film. Serial sectioning by a focused ion beam combined with scanning electron microscopy of the slices generates stacks of highly resolved images of this nanostructure. Dedicated image processing reconstructs the spatial structure from this stack such that 3-D image analysis yields geometric information that can be related to the optical performance.

Ordered Si-Ge nanostructures by glancing angle deposition via ion beam sputtering

2011 ◽  
Vol 1329 ◽  
Author(s):  
Jens Bauer ◽  
Michael Weise ◽  
Chinmay Khare ◽  
Bernd Rauschenbach
Keyword(s):  
Temporal Evolution ◽  
Ion Beam ◽  
Glancing Angle Deposition ◽  
Ion Beam Sputtering ◽  
Substrate Preparation ◽  
Sequential Deposition ◽  
Glancing Angle ◽  
Beam Sputtering ◽  
Distinct Morphology ◽  
Angle Deposition

ABSTRACTGlancing angle deposition (GLAD) was used to deposit ordered arrangements of Si/Ge-nanocolumns applying the ion beam sputter technique. After substrate preparation by electron beam lithography as well as nanosphere lithography the deposition behavior of GLAD nanocolumns in regular arrangements with different symmetries was studied. The nanocolumns exhibited distinct morphology regions which are correlated to their temporal evolution during deposition. Furthermore, the customization of the column morphology by non-uniform substrate rotation is considered. Axial Si/Ge-heterojunctions were incorporated by sequential deposition.

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