Performance and Modeling of a Nanostructured Relative Humidity Sensor
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ABSTRACTCapacitive humidity sensors were fabricated using interdigitated electrodes coated with amorphous nanostructured TiO2 thin films grown by glancing angle deposition. The sensor exhibited a large change in capacitance, increasing exponentially from ∼ 1 nF to ∼ 1 μF for an increase in relative humidity from 2 % to 92 %. A simple model of the capacitive response and dielectric constant of the devices has been developed and compared to the experimental results. From this comparison, it is clear that the magnitude of the device response observed cannot be explained with bulk dielectric constants or literature values.
2008 ◽
Vol 134
(2)
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pp. 666-671
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2011 ◽
Vol 21
(19)
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pp. 3652-3658
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2008 ◽
Vol 53
(9(5))
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pp. 2700-2704
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2007 ◽
Vol 431
(1-2)
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pp. 287-291
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2012 ◽
Vol 258
(7)
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pp. 2766-2770
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