Nanostructured Oxide Films for High-Speed Humidity Sensors

2003 ◽  
Vol 788 ◽  
Author(s):  
John J. Steele ◽  
Kenneth D. Harris ◽  
Michael J. Brett

ABSTRACTMiniaturized thin film humidity sensors were fabricated using nanostructured materials deposited by an advanced technique known as glancing angle deposition (GLAD). These sensors exhibited extremely fast desorption response times of less than 40 ms to steplike changes in humidity. Multiple response time measurements for various initial humidities have shown that the sensors maintain their rapid response at all levels of humidity.

2017 ◽  
Vol 49 (1) ◽  
pp. 73-79
Author(s):  
Jelena Potocnik ◽  
Milos Nenadovic ◽  
Bojan Jokic ◽  
Maja Popovic ◽  
Zlatko Rakocevic

In this work, Glancing Angle Deposition technique was used for obtaining nanostructured nickel thin film with vertical posts on glass substrate which was positioned 75 degrees with respect to the substrate normal and rotated with a suitable constant speed. The obtained nickel thin film was characterized by Scanning Electron Microscopy, Atomic Force Microscopy and X-ray Photoelectron Spectroscopy. It was found that the deposited thin film consists of 94.0 at.% of nickel. Magnetic properties of the deposited thin film were determined by Magneto-Optical Kerr Effect Microscopy. According to the obtained coercivity values, it can be concluded that the nickel thin film shows uniaxial magnetic anisotropy.


2000 ◽  
Vol 616 ◽  
Author(s):  
T. Smy ◽  
D. Vick ◽  
M. J. Brett ◽  
S. K. Dew ◽  
A. T. Wu ◽  
...  

AbstractA new fully three dimensional (3D) ballistic deposition simulator 3D-FILMS has been developed for the modeling of thin film deposition and structure. The simulator may be implemented using the memory resources available to workstations. In order to illustrate the capabilities of 3D-FILMS, we apply it to the growth of engineered porous thin films produced by the technique of GLancing Angle Deposition (GLAD).


2008 ◽  
Vol 8 (9) ◽  
pp. 1521-1522 ◽  
Author(s):  
Michael T. Taschuk ◽  
Jason B. Sorge ◽  
John J. Steele ◽  
Michael J. Brett

1999 ◽  
Vol 14 (4) ◽  
pp. 1197-1199 ◽  
Author(s):  
J. C. Sit ◽  
D. Vick ◽  
K. Robbie ◽  
M. J. Brett

Thin films with microstructures controlled on a nanometer scale have been fabricated using a recently developed process called glancing angle deposition (GLAD) which combines oblique angle evaporation with controlled substrate motion. Critical to the production of GLAD thin films is the requirement for a narrow angular flux distribution centered at an oblique incidence angle. We report here recent work with low-pressure, long-throw sputter deposition with which we have succeeded in fabricating porous titanium thin films possessing “zig-zag,” helical, and “pillar” microstructures, demonstrating microstructural control on a level consistent with evaporated GLAD. The use of sputtering for GLAD simplifies process control and should enable deposition of a broader range of thin film materials.


2004 ◽  
Vol 7 (9) ◽  
pp. H36 ◽  
Author(s):  
T. Karabacak ◽  
C. Wiegand ◽  
J. Senkevich ◽  
T. Lu ◽  
Dongdong Jia ◽  
...  

RSC Advances ◽  
2014 ◽  
Vol 4 (21) ◽  
pp. 10808-10814 ◽  
Author(s):  
Rakhi Grover ◽  
Ritu Srivastava ◽  
M. N. Kamalasanan ◽  
D. S. Mehta

Thin film encapsulation for OLEDs using alternate layer pairs of organic films and magnesium fluoride thin films deposited by normal and glancing angle deposition methods.


2020 ◽  
Vol 10 (1) ◽  
pp. 74-79 ◽  
Author(s):  
Aysegul Develioglu ◽  
Levent Trabzon ◽  
Yunus Alphan

Background: Glancing Angle Deposition (GLAD) provides oblique deposition and substrate motion to engineer thin film microstructures in three dimensions on nano scale. Using this technique zigzag, chevrons, staircase, post, helical and various type of nanostructures including 3-D multilayers can be obtained from various metals with controllable morphologies. The aim of the study is to increase surface porosity and junction using GLAD method area for thin film solar cells and therefore to increase p-n junction area. This provides efficient charge separation and strong light absorption. Methods: Glancing angle deposition using e-beam evaporation technique has been employed to create 3- D silicon nano-structures on the surface. Al and Ag contact layers were deposited by thermal evaporation technique. Hole-conductor polymer PEDOT: PSS was spin coated onto n type silicon thin film. Reflectance spectra were measured using UV-VIS spectroscopy. Scanning electron microscopy was used to image surface and cross-section with and without PEDOT: PSS. Also, transmission spectra of PEDOT: PSS was measured using UV-VIS spectroscopy. Surface wettability properties and contact angles of silicon samples were measured by contact angle measurement with water. Results: Columnar structures possess less reflection compared to the flat surface depending on surface porosity. This phenomenon shows that these structures can be used as anti-reflection coatings for solar cells and optical devices to decrease reflectivity and increase light harvesting with higher efficiency. Contact angle decreases when surface roughness increases therefore we can see that columnar structures are more hydrophilic compared to dense films. Flat silicon has 98° contact angle while columnar structures have 71° and 61°. PEDOT: PSS exhibits high transparency in the range from 200 to 1100 nm of wavelength of light, which resembles to solar radiation inside the atmosphere. Also, SEM images of the samples show that silicon columnar structures form better contact with PEDOT: PSS than flat surface. Conclusion: GLAD technique has been used to achieve homogenous rough surface by e-beam evaporation. Both cross-sectional and top-view SEM images show that columnar structures have higher porosity than flat surfaces. The response of UV-VIS spectroscopy shows that columnar structures have less reflection due to highly porous surface. With increasing incident flux angle, antireflection property of the surfaces was enhanced by surpassing the surface reflection. Due to the reduced hydrophobicity of porous structures, organic polymer can be distributed homogenously in between the columnar structures with increased p-n junction interface area. PEDOT: PSS is highly conductive, and it is highly transparent material in the range of the wavelength typically seen in the solar radiation. This makes it easier for light to reach to Si interface to generate electrons and holes. These results provide better understanding of Si- based heterojunction solar cells efficiency improvement with surface modification. This study also shows dependency of optical and electrical activity to surface geometry and surface porosity.


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