A surface acoustic wave H2S gas sensor employing nanocrystalline SnO2 thin film

A Rayleigh surface acoustic wave (RSAW) resonator with Cu2+-PANI-SnO2 nanocomposite thin film is investigated as a gas sensor for detecting the presence of nitric oxide (NO) in air. The sensor developed in this work was sensitive to NO gas at room temperature. It is shown that the sensor had a frequency shift of 0.45 ppm when it was exposed to 12 ppb NO. This RSAW sensor also exhibited repeatability to the presence of NO gas. Especially, the presented sensor showed highly selectivity with NO gas to separate from NO2 and CO2 gases.

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Nano-Crystalline SnO2 Thin Film Based Surface Acoustic Wave Sensor for Selective and Fast Detection of NO2 Gas

Advanced Science Letters ◽

10.1166/asl.2014.5470 ◽

2014 ◽

Vol 20 (5) ◽

pp. 1124-1128 ◽

Cited By ~ 3

Author(s):

V. Bhasker Raj ◽

Monika Tomar ◽

A. T. Nimal ◽

Manoj U. Sharma ◽

Vinay Gupta

Keyword(s):

Thin Film ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

Sno2 Thin Film ◽

Fast Detection ◽

Nano Crystalline ◽

Acoustic Wave Sensor

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A Novel MEMS based Surface Acoustic Wave Gas Sensor for Carbon Dioxide Detection in Hot-Process Areas

10.3390/ecsa-1-e001 ◽

2014 ◽

Author(s):

Angad Oberoi ◽

Rajarshi Sinha

Keyword(s):

Carbon Dioxide ◽

Acoustic Wave ◽

Gas Sensor ◽

Surface Acoustic Wave ◽

Carbon Dioxide Detection

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Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors

10.1557/proc-1139-gg03-47 ◽

2008 ◽

Author(s):

A. Kabulski ◽

V. R. Pagán ◽

D. Cortes ◽

R. Burda ◽

O. M. Mukdadi ◽

...

Keyword(s):

Thin Film ◽

Acoustic Wave ◽

Aluminum Nitride ◽

Surface Acoustic Wave ◽

Acoustic Wave Sensors ◽

Wave Sensors

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Investigation of Novel Surface Acoustic Wave (SAW) Gas Sensor Used in Sensor Network

PIERS Online ◽

10.2529/piers070827030221 ◽

2008 ◽

Vol 4 (3) ◽

pp. 346-350

Author(s):

Mitsutaka Hikita ◽

Keiya Minami ◽

Koki Takimoto ◽

Yasushi Hiraizumi

Keyword(s):

Acoustic Wave ◽

Sensor Network ◽

Gas Sensor ◽

Surface Acoustic Wave

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Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation

Micromachines ◽

10.3390/mi12010010 ◽

2020 ◽

Vol 12 (1) ◽

pp. 10

Author(s):

Alexander Kukaev ◽

Dmitry Lukyanov ◽

Denis Mikhailenko ◽

Daniil Safronov ◽

Sergey Shevchenko ◽

...

Keyword(s):

Thin Film ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

Acoustic Waves ◽

Inertial Sensors ◽

Surface Acoustic Waves ◽

Sensing Element ◽

Small Series ◽

Evaporation Technique ◽

Photolithography Process

Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.

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