Characterization of an Ar/N2 reactive amplified magnetron discharges by Atomic Absorption Spectroscopy and Glow Discharge Mass Spectrometry
2005 ◽
Vol 200
(1-4)
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pp. 841-845
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2014 ◽
Vol 100
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pp. 98-104
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2007 ◽
Vol 149
(1)
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pp. 238-242
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2002 ◽
Vol 11
(4)
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pp. 476-483
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Keyword(s):
1994 ◽
Vol 12
(9)
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pp. 1209-1213
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1987 ◽
Vol 42
(7)
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pp. 883-888
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2017 ◽
pp. 129-150
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2011 ◽
Vol 28
(7)
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pp. 1523-1531
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