Characterization of an Ar/N2 reactive amplified magnetron discharges by Atomic Absorption Spectroscopy and Glow Discharge Mass Spectrometry

2005 ◽  
Vol 200 (1-4) ◽  
pp. 841-845 ◽  
Author(s):  
S. Konstantinidis ◽  
A. Ricard ◽  
R. Snyders ◽  
H. Vandeparre ◽  
J.P. Dauchot ◽  
...  
2002 ◽  
Vol 11 (4) ◽  
pp. 476-483 ◽  
Author(s):  
C Penache ◽  
M Miclea ◽  
A Br uning-Demian ◽  
O Hohn ◽  
S Sch ssler ◽  
...  

Vacuum ◽  
1999 ◽  
Vol 53 (1-2) ◽  
pp. 17-20 ◽  
Author(s):  
C. Molle ◽  
A. Beauvois ◽  
M. Wautelet ◽  
J.P. Dauchot ◽  
M. Hecq

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