Surface morphology and mechanical properties of nanoscale TiAlN/SiNx multilayer coating deposited by reactive magnetron sputtering
2008 ◽
Vol 203
(1-2)
◽
pp. 171-179
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2011 ◽
Vol 205
(19)
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pp. 4471-4479
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1992 ◽
pp. 324-328
2020 ◽
Vol 389
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pp. 125614
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Keyword(s):
2011 ◽
Vol 11
(2)
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pp. 1758-1761
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