Effect of nitrogen content on structural and mechanical properties of AlTiZrTaHf(-N) high entropy films deposited by reactive magnetron sputtering

2022 ◽  
pp. 128051
Author(s):  
Mohamed El Garah ◽  
Djallel Eddine Touaibia ◽  
Sofiane Achache ◽  
Alexandre Michau ◽  
Elizaveta Sviridova ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Nitrogen Content ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
High Entropy

Microstructural and Mechanical Properties of Nanostructured Tungsten Nitride Thin Films Prepared by RF Reactive Magnetron Sputtering

2018 ◽  
Vol 24 (8) ◽  
pp. 5872-5876
Author(s):  
G Balakrishnan ◽  
V Sathiyaraj ◽  
M Dinesh ◽  
P. Naveen Chandran ◽  
C Thamotharan
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Nitrogen Content ◽  
High Hardness ◽  
Reactive Magnetron Sputtering ◽  
Tungsten Nitride ◽  
Reactive Magnetron ◽  
Microstructural Property ◽  
Steel Substrates

In the present work, nanostructured tungsten nitride (WN) thin films were deposited by RF reactive magnetron sputtering technique in a mixture of N2 and Argon atmosphere and its microstructure and mechanical properties were investigated. The Argon pressure was kept constant at 20 sccm, while the N2 partial pressures were varied (3%, 5%, 10% and 15%). The WN thin films are deposited on SS304 stainless steel substrates at a temperature of 500 °C. The microstructural property was analyzed using X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM) and mechanical properties were evaluated by nanoindentation technique. The XRD studies indicated the formation of different phases as a function of nitrogen content. The hardness and the young’s modulus values were in the range 27–39 GPa and 239–280 GPa, respectively. The high hardness values correspond to the coatings with the low nitrogen content and vice-versa. The mechanical properties of the tungsten nitride coatings were strongly influenced by the microstructure.

Microstructure and mechanical properties of (AlCrTiZrV)Nx high-entropy alloy nitride films by reactive magnetron sputtering

Vacuum ◽  
2020 ◽  
Vol 181 ◽  
pp. 109706 ◽  
Author(s):  
Liqiang Chen ◽  
Wei Li ◽  
Ping Liu ◽  
Ke Zhang ◽  
Fengcang Ma ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
High Entropy Alloy ◽  
Reactive Magnetron ◽  
High Entropy ◽  
Microstructure And Mechanical Properties

Relationship between CH4/Ar Ratio, Stoichiometry, and Mechanical Properties of TaCx Coatings Produced by Reactive Magnetron Sputtering

2021 ◽  
pp. 149879
Author(s):  
K.P. Valdez ◽  
H.A. Castillo ◽  
Leonel Cota ◽  
J.H. Quintero-Orozco ◽  
E. Restrepo-Parra ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Microstructure and mechanical properties of W-C:H coatings deposited by pulsed reactive magnetron sputtering

2011 ◽  
Vol 205 (19) ◽  
pp. 4471-4479 ◽  
Author(s):  
Andrzej Czyżniewski ◽  
Witold Gulbiński ◽  
György Radnóczi ◽  
Marianna Szerencsi ◽  
Mieczysław Pancielejko
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Microstructure And Mechanical Properties

scholarly journals Structural and Mechanical Properties of Zr-Si-N Thin Films Prepared by Reactive Magnetron Sputtering

2015 ◽  
Vol 18 (suppl 2) ◽  
pp. 30-34 ◽  
Author(s):  
Flávio Gustavo Ribeiro Freitas ◽  
Roberto Hübler ◽  
Gabriel Soares ◽  
Amanda Gardênia Santos Conceição ◽  
Edson Reis Vitória ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Influence of N content on structure and mechanical properties of multi-component Al-Cr-Nb-Y-Zr based thin films by reactive magnetron sputtering

2020 ◽  
Vol 389 ◽  
pp. 125614 ◽  
Author(s):  
Kristina von Fieandt ◽  
Lars Riekehr ◽  
Barbara Osinger ◽  
Stefan Fritze ◽  
Erik Lewin
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
N Content
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