scholarly journals Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films

2012 ◽  
Vol 206 (10) ◽  
pp. 2706-2710 ◽  
Author(s):  
K. Sarakinos ◽  
A. Braun ◽  
C. Zilkens ◽  
S. Mráz ◽  
J.M. Schneider ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Carbon Films ◽  
Diamond Like Carbon

Diamond-like carbon films prepared by high power impulse magnetron sputtering

2019 ◽  
Vol 17 ◽  
pp. 1549-1554
Author(s):  
Jidapa Lomon ◽  
Ponthip Chaiyabin ◽  
Prayoon Songsiriritthigul ◽  
Thanit Saisopa ◽  
Kittikhun Seawsakul ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Carbon Films ◽  
Diamond Like Carbon

Microstructure and properties of Nb-doped diamond-like carbon films deposited by high power impulse magnetron sputtering

2018 ◽  
Vol 663 ◽  
pp. 159-167 ◽  
Author(s):  
Ji Cheng Ding ◽  
Wei Dai ◽  
Teng Fei Zhang ◽  
Pin Zhao ◽  
Je Moon Yun ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Microstructure And Properties

Diamond like carbon films with embedded Cu nanoclusters deposited by reactive high power impulse magnetron sputtering: Pulse length effects

2019 ◽  
Vol 673 ◽  
pp. 1-6 ◽  
Author(s):  
Š. Meškinis ◽  
A. Vasiliauskas ◽  
M. Andrulevičius ◽  
A. Jurkevičiūtė ◽  
D. Peckus ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Pulse Length ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Cu Nanoclusters ◽  
Length Effects
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