Effects of adding hydrocarbon gas to a high-power impulse magnetron sputtering system on the properties of diamond-like carbon films

2020 ◽  
Vol 701 ◽  
pp. 137924 ◽  
Author(s):  
Takashi Kimura ◽  
Kento Sakai
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Hydrocarbon Gas ◽  
Sputtering System

Diamond-like carbon films prepared by high power impulse magnetron sputtering

2019 ◽  
Vol 17 ◽  
pp. 1549-1554
Author(s):  
Jidapa Lomon ◽  
Ponthip Chaiyabin ◽  
Prayoon Songsiriritthigul ◽  
Thanit Saisopa ◽  
Kittikhun Seawsakul ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Carbon Films ◽  
Diamond Like Carbon

scholarly journals Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films

2012 ◽  
Vol 206 (10) ◽  
pp. 2706-2710 ◽  
Author(s):  
K. Sarakinos ◽  
A. Braun ◽  
C. Zilkens ◽  
S. Mráz ◽  
J.M. Schneider ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Carbon Films ◽  
Diamond Like Carbon

scholarly journals Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties

2017 ◽  
Vol 2017 ◽  
pp. 1-8 ◽  
Author(s):  
Stefan Flege ◽  
Ruriko Hatada ◽  
Andreas Hanauer ◽  
Wolfgang Ensinger ◽  
Takao Morimura ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Magnetron Sputtering ◽  
Plasma Source ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Preparation Technique ◽  
Plasma Source Ion Implantation ◽  
Hydrocarbon Gas ◽  
Sputter Yield ◽  
Metal Addition

Metal-containing diamond-like carbon (Me-DLC) films were prepared by a combination of plasma source ion implantation (PSII) and reactive magnetron sputtering. Two metals were used that differ in their tendency to form carbide and possess a different sputter yield, that is, Cu with a relatively high sputter yield and Ti with a comparatively low one. The DLC film preparation was based on the hydrocarbon gas ethylene (C2H4). The preparation technique is described and the parameters influencing the metal content within the film are discussed. Film properties that are changed by the metal addition, such as structure, electrical resistivity, and friction coefficient, were evaluated and compared with those of pure DLC films as well as with literature values for Me-DLC films prepared with a different hydrocarbon gas or containing other metals.

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