Surface treatment of diamond-like carbon films by reactive Ar/CF4 high-power pulsed magnetron sputtering plasmas

2015 ◽  
Vol 365 ◽  
pp. 155-158 ◽  
Author(s):  
Takashi Kimura ◽  
Ryotaro Nishimura ◽  
Kingo Azuma ◽  
Setsuo Nakao ◽  
Tsutomu Sonoda ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Surface Treatment ◽  
High Power ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Pulsed Magnetron

Diamond-like carbon films prepared by high power impulse magnetron sputtering

2019 ◽  
Vol 17 ◽  
pp. 1549-1554
Author(s):  
Jidapa Lomon ◽  
Ponthip Chaiyabin ◽  
Prayoon Songsiriritthigul ◽  
Thanit Saisopa ◽  
Kittikhun Seawsakul ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Carbon Films ◽  
Diamond Like Carbon

scholarly journals Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films

2012 ◽  
Vol 206 (10) ◽  
pp. 2706-2710 ◽  
Author(s):  
K. Sarakinos ◽  
A. Braun ◽  
C. Zilkens ◽  
S. Mráz ◽  
J.M. Schneider ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Carbon Films ◽  
Diamond Like Carbon
Sign in / Sign up

Export Citation Format

Share Document