Conductive diamond-like carbon films prepared by high power pulsed magnetron sputtering with bipolar type plasma based ion implantation system

Diamond and Related Materials ◽

10.1016/j.diamond.2017.06.011 ◽

2017 ◽

Vol 77 ◽

pp. 122-130 ◽

Author(s):

Setsuo Nakao ◽

Takashi Kimura ◽

Taku Suyama ◽

Kingo Azuma

Keyword(s):

Ion Implantation ◽

Magnetron Sputtering ◽

Carbon Films ◽

Diamond Like Carbon ◽

Bipolar Type ◽

Pulsed Magnetron

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Surface treatment of diamond-like carbon films by reactive Ar/CF4 high-power pulsed magnetron sputtering plasmas

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2015.03.020 ◽

2015 ◽

Vol 365 ◽

pp. 155-158 ◽

Author(s):

Takashi Kimura ◽

Ryotaro Nishimura ◽

Kingo Azuma ◽

Setsuo Nakao ◽

Tsutomu Sonoda ◽

...

Keyword(s):

Magnetron Sputtering ◽

Surface Treatment ◽

Carbon Films ◽

Diamond Like Carbon ◽

Pulsed Magnetron

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Optical properties of diamond like carbon films containing copper, grown by high power pulsed magnetron sputtering and direct current magnetron sputtering: Structure and composition effects

Thin Solid Films ◽

10.1016/j.tsf.2014.11.045 ◽

2015 ◽

Vol 581 ◽

pp. 48-53 ◽

Author(s):

Š. Meškinis ◽

A. Čiegis ◽

A. Vasiliauskas ◽

K. Šlapikas ◽

T. Tamulevičius ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Carbon Films ◽

Diamond Like Carbon ◽

Composition Effects ◽

Direct Current Magnetron Sputtering ◽

Pulsed Magnetron

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Preparation of Titanium-Doped Diamond-Like Carbon Films With Electrical Conductivity Using High Power Pulsed Magnetron Sputtering System With Bipolar Pulse Voltage Source for Substrate

IEEE Transactions on Plasma Science ◽

10.1109/tps.2016.2587750 ◽

2016 ◽

Vol 44 (12) ◽

pp. 3083-3090 ◽

Author(s):

Takashi Kimura ◽

Hikaru Kamata ◽

Setsuo Nakao ◽

Kingo Azuma

Keyword(s):

Electrical Conductivity ◽

Magnetron Sputtering ◽

Carbon Films ◽

Pulse Voltage ◽

Voltage Source ◽

Diamond Like Carbon ◽

Bipolar Pulse ◽

Sputtering System ◽

Pulsed Magnetron

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Preparation of silicon-doped diamond-like carbon films with electrical conductivity by reactive high-power impulse magnetron sputtering combined with a plasma-based ion implantation system

Diamond and Related Materials ◽

10.1016/j.diamond.2019.107635 ◽

2020 ◽

Vol 101 ◽

pp. 107635 ◽

Author(s):

Yuki Shibata ◽

Takashi Kimura ◽

Setsuo Nakao ◽

Kingo Azuma

Keyword(s):

Electrical Conductivity ◽

Ion Implantation ◽

Magnetron Sputtering ◽

Carbon Films ◽

Diamond Like Carbon ◽

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Microstructure and surface properties of chromium-doped diamond-like carbon thin films fabricated by high power pulsed magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2013.02.104 ◽

2013 ◽

Vol 276 ◽

pp. 31-36 ◽

Author(s):

Zhongzhen Wu ◽

Xiubo Tian ◽

Gang Gui ◽

Chunzhi Gong ◽

Shiqin Yang ◽

...

Keyword(s):

Magnetron Sputtering ◽

Surface Properties ◽

Diamond Like Carbon ◽

Carbon Thin Films ◽

Pulsed Magnetron

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Synthesis of hard diamond-like carbon films by double-pulse high-power impulse magnetron sputtering

Diamond and Related Materials ◽

10.1016/j.diamond.2020.107996 ◽

2020 ◽

Vol 108 ◽

pp. 107996 ◽

Author(s):

Takashi Kimura ◽

Kento Sakai

Keyword(s):

Magnetron Sputtering ◽

Carbon Films ◽

Double Pulse ◽

Diamond Like Carbon

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Optical and Electrical Properties of Nitrogen-Doped Diamond-Like Carbon Films Prepared by a Bipolar-Type Plasma-Based Ion Implantation

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.01ac04 ◽

2012 ◽

Vol 51 (1) ◽

pp. 01AC04 ◽

Author(s):

Setsuo Nakao ◽

Tetsuo Soga ◽

Tsutomu Sonoda ◽

Tokuhiro Asada ◽

Naoki Kishi

Keyword(s):

Electrical Properties ◽

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Optical And Electrical Properties ◽

Nitrogen Doped ◽

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Optical and Electrical Properties of Nitrogen-Doped Diamond-Like Carbon Films Prepared by a Bipolar-Type Plasma-Based Ion Implantation

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.01ac04 ◽

2012 ◽

Vol 51 (1S) ◽

pp. 01AC04 ◽

Author(s):

Setsuo Nakao ◽

Tetsuo Soga ◽

Tsutomu Sonoda ◽

Tokuhiro Asada ◽

Naoki Kishi

Keyword(s):

Electrical Properties ◽

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Optical And Electrical Properties ◽

Nitrogen Doped ◽

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Effects of working pressure on the deposition of diamond-like carbon films prepared by bipolar-type plasma based ion implantation

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2009.01.103 ◽

2009 ◽

Vol 267 (8-9) ◽

pp. 1684-1687 ◽

Author(s):

Setsuo Nakao

Keyword(s):

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Working Pressure ◽

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Influence of Ne sputtering gas on structure and properties of diamond-like carbon films deposited by pulsed-magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2017.02.009 ◽

2017 ◽

Vol 625 ◽

pp. 163-167 ◽

Author(s):

Wei Dai ◽

Xiang Gao ◽

Qimin Wang ◽

Aijiao Xu

Keyword(s):

Magnetron Sputtering ◽

Carbon Films ◽

Diamond Like Carbon ◽

Structure And Properties ◽

Pulsed Magnetron

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