Mechanical and tribological properties of CrN/TiN multilayer coatings deposited by pulsed dc magnetron sputtering

2015 ◽  
Vol 276 ◽  
pp. 152-159 ◽  
Author(s):  
Y.X. Ou ◽  
J. Lin ◽  
H.L. Che ◽  
W.D. Sproul ◽  
J.J. Moore ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Multilayer Coatings ◽  
Dc Magnetron Sputtering ◽  
Mechanical And Tribological Properties ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Characterization of Ti–Zr–V thin films deposited by DC and unipolar pulsed DC magnetron sputtering

Vacuum ◽  
2021 ◽  
Vol 188 ◽  
pp. 110200
Author(s):  
Sihui Wang ◽  
Wei Wei ◽  
Yonghao Gao ◽  
Haibin Pan ◽  
Yong Wang
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering
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