Microstructure and Young's modulus of ZrN thin film prepared by dual ion beam sputtering deposition
2019 ◽
Vol 374
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pp. 997-1005
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Keyword(s):
Ion Beam
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2002 ◽
Vol 11
(3-6)
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pp. 896-900
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2016 ◽
Vol 42
(3)
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pp. 4171-4175
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