Deposition Characteristics of AlN Thin Film Prepared by the Dual Ion Beam Sputtering System

2006 ◽  
Vol 36 (1) ◽  
pp. 81-87 ◽  
Author(s):  
T. L. Hu ◽  
S. W. Mao ◽  
C. P. Chao ◽  
M. F. Wu ◽  
H. L. Huang ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering ◽  
Sputtering System

RFe2 (R=rare earth) thin film formation by an ion beam sputtering system with a plasma filament type ion source

1993 ◽  
Vol 59 (1-3) ◽  
pp. 156-159 ◽  
Author(s):  
Y. Matsumura ◽  
T. Noguchi ◽  
T. Kurino ◽  
H. Kaneko ◽  
H.H. Uchida ◽  
...  
Keyword(s):  
Thin Film ◽  
Rare Earth ◽  
Film Formation ◽  
Ion Beam ◽  
Ion Source ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Thin Film Formation ◽  
Filament Type ◽  
Sputtering System

Microstructure and Young's modulus of ZrN thin film prepared by dual ion beam sputtering deposition

2019 ◽  
Vol 374 ◽  
pp. 997-1005 ◽  
Author(s):  
Fei Zhu ◽  
Kangwei Zhu ◽  
Yin Hu ◽  
Yunhan Ling ◽  
Dong Wang ◽  
...  
Keyword(s):  
Thin Film ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Sputtering Deposition ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering
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