scholarly journals Phase control and Young’s modulus of tungsten thin film prepared by dual ion beam sputtering deposition

AIP Advances ◽  
2018 ◽  
Vol 8 (3) ◽  
pp. 035321 ◽  
Author(s):  
Fei Zhu ◽  
Zheng Xie ◽  
Zhengjun Zhang
Keyword(s):  
Thin Film ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Ion Beam ◽  
Phase Control ◽  
Ion Beam Sputtering ◽  
Sputtering Deposition ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Formation of the crystalline β-C3N4 phase by dual ion beam sputtering deposition

2007 ◽  
Vol 61 (14-15) ◽  
pp. 2855-2858 ◽  
Author(s):  
J.P. Rivière ◽  
D. Texier ◽  
J. Delafond ◽  
M. Jaouen ◽  
E.L. Mathé ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Sputtering Deposition ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Ultra-low stress high reflective film by dual-ion-beam sputtering deposition

2021 ◽  
Vol 61 (03) ◽  
Author(s):  
Jinlin Bai ◽  
Huasong Liu ◽  
Yugang Jiang ◽  
Lishuan Wang ◽  
Xiao Yang ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Sputtering Deposition ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

The effect of charged particles when preparing ZnO thin film by ion beam sputtering deposition

1988 ◽  
Vol 33-34 ◽  
pp. 1114-1119 ◽  
Author(s):  
Yoshihiko Suzuki ◽  
Tsutom Yotsuya ◽  
Katsumi Takiguchi ◽  
Masaaki Yoshitake ◽  
Soichi Ogawa
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Charged Particles ◽  
Zno Thin Film ◽  
Ion Beam Sputtering ◽  
Sputtering Deposition ◽  
Beam Sputtering

Dual ion-beam sputtering deposition of palladium-fluoropolymer nano-composites

2005 ◽  
Vol 80 (4) ◽  
pp. 791-795 ◽  
Author(s):  
I. Farella ◽  
A. Valentini ◽  
N. Cioffi ◽  
L. Torsi
Keyword(s):  
Ion Beam ◽  
Nano Composites ◽  
Ion Beam Sputtering ◽  
Sputtering Deposition ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Deposition Characteristics of AlN Thin Film Prepared by the Dual Ion Beam Sputtering System

2006 ◽  
Vol 36 (1) ◽  
pp. 81-87 ◽  
Author(s):  
T. L. Hu ◽  
S. W. Mao ◽  
C. P. Chao ◽  
M. F. Wu ◽  
H. L. Huang ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering ◽  
Sputtering System
Sign in / Sign up

Export Citation Format

Share Document