Effect of nitrogen doping on the microstructure and thermal stability of diamond-like carbon coatings containing silicon and oxygen

Author(s):  
Jihua Peng ◽  
Yang Xiao ◽  
Manzhong Yang ◽  
Jiacheng Liao
2005 ◽  
Vol 14 (9) ◽  
pp. 1489-1493 ◽  
Author(s):  
Ricky K.Y. Fu ◽  
Y.F. Mei ◽  
M.Y. Fu ◽  
X.Y. Liu ◽  
Paul K. Chu

1995 ◽  
Vol 4 (3) ◽  
pp. 191-199 ◽  
Author(s):  
D.R. Tallant ◽  
J.E. Parmeter ◽  
M.P. Siegal ◽  
R.L. Simpson

1992 ◽  
Vol 284 ◽  
Author(s):  
V.Kh. Kudoyargva ◽  
A. A. Aivazov ◽  
B. G. Budaguan ◽  
I. V. Filatova

ABSTRACTThe investigations of thermal stability of a-SiNx:H films (x≤0.4) have xbeen performed bv both IR spectroscopy and DTA techniques. The properties of samples with x≤0.06 were attentively considered because in this case the nitrogen may be treated as an impurity in a-Si:H. It has been shown that controlled nitrogen doping (up to 0.5 Pa NH3) can be used as an effective technique for thermostabilization of a-Si:H properties.


2013 ◽  
Vol 30 (3) ◽  
pp. 037401 ◽  
Author(s):  
Meng-Jiao Xia ◽  
Feng Rao ◽  
Zhi-Tang Song ◽  
Kun Ren ◽  
Liang-Cai Wu ◽  
...  

2007 ◽  
Vol 4 (S1) ◽  
pp. S254-S258 ◽  
Author(s):  
Florian Schwarz ◽  
Claus Hammerl ◽  
Götz Thorwarth ◽  
Marcus Kuhn ◽  
Bernd Stritzker

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