Influences of deposition rate and oxygen partial pressure on residual stress and microstructure of YSZ thin films

2009 ◽  
Vol 517 (15) ◽  
pp. 4295-4298 ◽  
Author(s):  
Qiling Xiao ◽  
Hongbo He ◽  
Shuying Shao ◽  
Jianda Shao ◽  
Zhengxiu Fan
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Deposition Rate

Influences of Oxygen Partial Pressure and Deposition Rate on Residual Stress of YSZ Thin Films

2009 ◽  
Vol 36 (5) ◽  
pp. 1195-1199 ◽  
Author(s):  
肖祁陵 Xiao Qiling ◽  
邵淑英 Shao Shuying ◽  
邵建达 Shao Jianda ◽  
范正修 Fan Zhengxiu
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Deposition Rate

scholarly journals Influences of deposition rate and oxygen partial pressure on residual stress of HfO2 films

2009 ◽  
Vol 58 (10) ◽  
pp. 7025
Author(s):  
Cen Min ◽  
Zhang Yue-Guang ◽  
Chen Wei-Lan ◽  
Gu Pei-Fu
Keyword(s):  
Residual Stress ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Deposition Rate

Highly conductive AZO thin films obtained by rationally optimizing substrate temperature and oxygen partial pressure

2017 ◽  
Vol 644 (1) ◽  
pp. 190-196 ◽  
Author(s):  
Yong Zeng ◽  
Zhiqiang Fang ◽  
Honglong Ning ◽  
Feng Zhu ◽  
Xianzhe Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Oxygen Partial Pressure ◽  
Partial Pressure

Behavior of dual ion beam sputtered MgZnO thin films for different oxygen partial pressure

2013 ◽  
Vol 25 (2) ◽  
pp. 772-777 ◽  
Author(s):  
Saurabh Kumar Pandey ◽  
Sushil Kumar Pandey ◽  
Vishnu Awasthi ◽  
Ashish Kumar ◽  
M. Gupta ◽  
...  
Keyword(s):  
Thin Films ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Ion Beam
Sign in / Sign up

Export Citation Format

Share Document