Precise etch-depth control of microlens-integrated intracavity contacted vertical-cavity surface-emitting lasers by in-situ laser reflectometry and reflectivity modeling

Thin Solid Films ◽

10.1016/j.tsf.2009.03.198 ◽

2009 ◽

Vol 517 (19) ◽

pp. 5773-5778 ◽

Author(s):

Y.M. Song ◽

K.S. Chang ◽

B.H. Na ◽

J.S. Yu ◽

Y.T. Lee

Keyword(s):

Cavity Surface ◽

Surface Emitting Lasers ◽

Depth Control ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity ◽

Laser Reflectometry

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Room-temperature pulsed operation of 1.5 μm triple fused vertical cavity surface emitting lasers with in-situ built-in lateral current confinement

Conference Digest. ISLC 1998 NARA. 1998 IEEE 16th International Semiconductor Laser Conference (Cat. No. 98CH361130) ◽

10.1109/islc.1998.734159 ◽

2002 ◽

Author(s):

A.V. Syrbu ◽

V.P. Lakovlev ◽

C.-A. Berseth ◽

O. Dehaese ◽

A. Rudra ◽

...

Keyword(s):

Room Temperature ◽

Cavity Surface ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Current Confinement ◽

Lateral Current ◽

Emitting Lasers ◽

Vertical Cavity

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Transverse mode control by etch-depth tuning in 1120-nm GaInAs/GaAs photonic crystal vertical-cavity surface-emitting lasers

Optics Express ◽

10.1364/opex.12.000859 ◽

2004 ◽

Vol 12 (5) ◽

pp. 859 ◽

Author(s):

Jong-Hwa Baek ◽

Dae-Sung Song ◽

In-Kag Hwang ◽

Kum-Hee Lee ◽

Y. H. Lee ◽

...

Keyword(s):

Photonic Crystal ◽

Transverse Mode ◽

Cavity Surface ◽

Mode Control ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity

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Low resistivity vertical-cavity surface emitting lasers grown by molecular- beam epitaxy using sinusoidal-composition grading in mirrors and in situ nonalloyed ohmic contacts

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.588156 ◽

1995 ◽

Vol 13 (2) ◽

pp. 758 ◽

Author(s):

M. Hong

Keyword(s):

Molecular Beam Epitaxy ◽

Ohmic Contacts ◽

Molecular Beam ◽

Cavity Surface ◽

Low Resistivity ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity

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Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metalorganic vapor phase epitaxy with in situ reflectometry

IEEE Photonics Technology Letters ◽

10.1109/68.536629 ◽

1996 ◽

Vol 8 (10) ◽

pp. 1285-1287 ◽

Author(s):

H.Q. Hou ◽

H.C. Chui ◽

K.D. Choquette ◽

B.E. Hammons ◽

W.G. Breiland ◽

...

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Cavity Surface ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity ◽

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Etch depth dependence of differential quantum efficiency in single mode photonic crystal vertical cavity surface emitting lasers

LEOS 2008 - 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society ◽

10.1109/leos.2008.4688658 ◽

2008 ◽

Author(s):

Meng Peun Tan ◽

Ansas Matthias Kasten ◽

Dominic F. Siriani ◽

Kent D. Choquette

Keyword(s):

Photonic Crystal ◽

Quantum Efficiency ◽

Single Mode ◽

Cavity Surface ◽

Depth Dependence ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity

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In situ measurement of cavity length variation across the transverse section of broad-area vertical-cavity surface-emitting lasers

Applied Physics Letters ◽

10.1063/1.1608463 ◽

2003 ◽

Vol 83 (12) ◽

pp. 2303-2305 ◽

Author(s):

Stéphane Barland ◽

Francesco Marino ◽

Massimo Giudici ◽

Jorge Tredicce ◽

Salvador Balle

Keyword(s):

Cavity Length ◽

Transverse Section ◽

Cavity Surface ◽

Length Variation ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity

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Novel application of optically pumped vertical cavity surface emitting lasers : fast amplifying optical switch

Journal de Physique III ◽

10.1051/jp3:1994283 ◽

1994 ◽

Vol 4 (12) ◽

pp. 2371-2378

Author(s):

R. Raj

Keyword(s):

Optical Switch ◽

Cavity Surface ◽

Optically Pumped ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity

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Recent developments in the area of vertical cavity surface emitting lasers

Journal de Physique IV (Proceedings) ◽

10.1051/jp4:1999201 ◽

1999 ◽

Vol 09 (PR2) ◽

pp. Pr2-3 ◽

Author(s):

J. Jacquet ◽

P. Salet ◽

A. Plais ◽

F. Brillouet ◽

E. Derouin ◽

...

Keyword(s):

Cavity Surface ◽

Surface Emitting Lasers ◽

Recent Developments ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity

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Aperture diameter dependences in GaN-based vertical-cavity surface-emitting lasers with nano-height cylindrical waveguide formed by BCl3 dry etching

Applied Physics Express ◽

10.35848/1882-0786/abcfd7 ◽

2020 ◽

Vol 14 (1) ◽

pp. 012003

Author(s):

Ryosuke Iida ◽

Yusuke Ueshima ◽

Sho Iwayama ◽

Tetsuya Takeuchi ◽

Satoshi Kamiyama ◽

...

Keyword(s):

Dry Etching ◽

Cylindrical Waveguide ◽

Cavity Surface ◽

Aperture Diameter ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity

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Detector-enclosed vertical-cavity surface emitting lasers

Electronics Letters ◽

10.1049/el:19930311 ◽

1993 ◽

Vol 29 (5) ◽

pp. 466 ◽

Author(s):

K.D. Choquette ◽

N. Tabatabaie ◽

R.E. Leibenguth

Keyword(s):

Cavity Surface ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity

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