Magnetron sputter deposition of low-stress, carbon-containing cubic boron nitride films using Ar―N2―CH4 gas mixtures

2009 ◽  
Vol 518 (5) ◽  
pp. 1455-1458 ◽  
Author(s):  
S. Ulrich ◽  
J. Ye ◽  
M. Stüber ◽  
C. Ziebert
Keyword(s):  
Boron Nitride ◽  
Cubic Boron Nitride ◽  
Gas Mixtures ◽  
Sputter Deposition ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Boron Nitride Films

Growth process of cubic boron nitride films in bias sputter deposition

1997 ◽  
Vol 295 (1-2) ◽  
pp. 137-141 ◽  
Author(s):  
Yukiko Yamada ◽  
Yoshinao Tatebayashi ◽  
Osamu Tsuda ◽  
Toyonobu Yoshida
Keyword(s):  
Boron Nitride ◽  
Growth Process ◽  
Cubic Boron Nitride ◽  
Sputter Deposition ◽  
Boron Nitride Films

Preparation of cubic boron nitride films by plasma-enhanced chemical vapour deposition of BF3, N2 and H2 gas mixtures

1991 ◽  
Vol 49 (1-3) ◽  
pp. 422-426 ◽  
Author(s):  
Juan Manuel Mendez ◽  
Stephen Muhl ◽  
Mario Farias ◽  
Gabriel Soto ◽  
Leonel Cota-Araiza
Keyword(s):  
Boron Nitride ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Cubic Boron Nitride ◽  
Chemical Vapour ◽  
Gas Mixtures ◽  
Boron Nitride Films

Energetic particle fluxes in magnetron sputter deposition of a-Si:H

1991 ◽  
Vol 137-138 ◽  
pp. 783-786 ◽  
Author(s):  
Alan M. Myers ◽  
James R. Doyle ◽  
G. Jeff Feng ◽  
Nagi Maley ◽  
David L. Ruzic ◽  
...  
Keyword(s):  
Energetic Particle ◽  
Sputter Deposition ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Particle Fluxes
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