Influence of Ar–N2 gas composition on the magnetron-sputter deposition of cubic boron nitride films

2010 ◽  
Vol 205 ◽  
pp. S96-S98 ◽  
Author(s):  
Sven Ulrich ◽  
Jian Ye ◽  
Michael Stüber
Keyword(s):  
Boron Nitride ◽  
Cubic Boron Nitride ◽  
Sputter Deposition ◽  
Gas Composition ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Boron Nitride Films

Growth process of cubic boron nitride films in bias sputter deposition

1997 ◽  
Vol 295 (1-2) ◽  
pp. 137-141 ◽  
Author(s):  
Yukiko Yamada ◽  
Yoshinao Tatebayashi ◽  
Osamu Tsuda ◽  
Toyonobu Yoshida
Keyword(s):  
Boron Nitride ◽  
Growth Process ◽  
Cubic Boron Nitride ◽  
Sputter Deposition ◽  
Boron Nitride Films

Energetic particle fluxes in magnetron sputter deposition of a-Si:H

1991 ◽  
Vol 137-138 ◽  
pp. 783-786 ◽  
Author(s):  
Alan M. Myers ◽  
James R. Doyle ◽  
G. Jeff Feng ◽  
Nagi Maley ◽  
David L. Ruzic ◽  
...  
Keyword(s):  
Energetic Particle ◽  
Sputter Deposition ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Particle Fluxes
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