Microstructure and electronic properties of microcrystalline silicon carbide thin films prepared by hot-wire CVD

A narrow process window for the preparation of polytypes of microcrystalline silicon carbide thin films by hot-wire CVD method

Journal of Non-Crystalline Solids ◽

10.1016/j.jnoncrysol.2012.03.028 ◽

2012 ◽

Vol 358 (17) ◽

pp. 1987-1989 ◽

Cited By ~ 4

Author(s):

Norimitsu Yoshida ◽

Sho Terazawa ◽

Kotaro Hayashi ◽

Tomonari Hamaguchi ◽

Hironori Natsuhara ◽

...

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Process Window ◽

Hot Wire ◽

Cvd Method

Electronic properties of low temperature microcrystalline silicon carbide prepared by Hot Wire CVD

Thin Solid Films ◽

10.1016/j.tsf.2007.06.056 ◽

2008 ◽

Vol 516 (5) ◽

pp. 630-632 ◽

Cited By ~ 14

Author(s):

Stefan Klein ◽

Arup Dasgupta ◽

Friedhelm Finger ◽

Reinhard Carius ◽

Torsten Bronger

Keyword(s):

Silicon Carbide ◽

Low Temperature ◽

Electronic Properties ◽

Hot Wire ◽

Microcrystalline silicon thin film solar cells with microcrystalline silicon carbide window layers and silicon absorber layers both prepared by Hot-Wire CVD

physica status solidi (RRL) - Rapid Research Letters ◽

10.1002/pssr.200903423 ◽

2010 ◽

Vol 4 (3-4) ◽

pp. 61-63 ◽

Cited By ~ 5

Author(s):

Tao Chen ◽

Yuelong Huang ◽

Deren Yang ◽

Reinhard Carius ◽

Friedhelm Finger

Keyword(s):

Thin Film ◽

Silicon Carbide ◽

Solar Cells ◽

Thin Film Solar Cells ◽

Hot Wire ◽

Silicon Thin Film

Pressure dependent structural and optical properties of silicon carbide thin films deposited by hot wire chemical vapor deposition from pure silane and methane gases

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-012-0934-z ◽

2012 ◽

Vol 24 (4) ◽

pp. 1361-1368 ◽

Cited By ~ 16

Author(s):

Fatemeh Shariatmadar Tehrani ◽

Boon Tong Goh ◽

Muhamad Rasat Muhamad ◽

Saadah Abdul Rahman

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Hot Wire ◽

Structural And Optical Properties

Hot wire chemical vapor deposited multiphase silicon carbide (SiC) thin films at various filament temperatures

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-016-4995-2 ◽

2016 ◽

Vol 27 (12) ◽

pp. 12340-12350 ◽

Cited By ~ 1

Author(s):

Amit Pawbake ◽

Vaishali Waman ◽

Ravindra Waykar ◽

Ashok Jadhavar ◽

Ajinkya Bhorde ◽

...

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Chemical Vapor ◽

Hot Wire ◽

Chemical Vapor Deposited

Structure of amorphous and microcrystalline silicon thin films prepared at various gas pressures and gas flow rates by hot-wire chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2005.07.134 ◽

2006 ◽

Vol 501 (1-2) ◽

pp. 102-106 ◽

Cited By ~ 9

Author(s):

T. Daimaru ◽

A. Tabata ◽

T. Mizutani

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Gas Flow ◽

Chemical Vapor ◽

Hot Wire ◽

Flow Rates ◽

Silicon Thin Films ◽

Gas Pressures

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

Hydrogen evolution in hydrogenated microcrystalline silicon carbide thin films

10.1116/1.5090174 ◽

2019 ◽

Vol 37 (3) ◽

pp. 031218

Author(s):

Soumia Nemmour ◽

Siham Djoumi ◽

Fatiha Kail ◽

Pere Roura-Grabulosa ◽

Pere Roca i Cabarrocas ◽

...

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Hydrogen Evolution ◽

Sub-bandgap optical absorption spectroscopy of hydrogenated microcrystalline silicon thin films prepared using hot-wire CVD (Cat-CVD) process

Thin Solid Films ◽

10.1016/j.tsf.2005.07.137 ◽

2006 ◽

Vol 501 (1-2) ◽

pp. 121-124 ◽

Cited By ~ 6

Author(s):

O. Goktas ◽

N. Isik ◽

S. Okur ◽

M. Gunes ◽

R. Carius ◽

...

Keyword(s):

Thin Films ◽

Optical Absorption ◽

Absorption Spectroscopy ◽

Optical Absorption Spectroscopy ◽

Hot Wire ◽

Silicon Thin Films

Highly transparent microcrystalline silicon carbide grown with hot wire chemical vapor deposition as window layers in n-i-p microcrystalline silicon solar cells

Applied Physics Letters ◽

10.1063/1.2739335 ◽

2007 ◽

Vol 90 (20) ◽

pp. 203502 ◽

Cited By ~ 34

Author(s):

Y. Huang ◽

A. Dasgupta ◽

A. Gordijn ◽

F. Finger ◽

R. Carius

Keyword(s):

Silicon Carbide ◽

Solar Cells ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Hot Wire ◽

Highly conductive microcrystalline silicon carbide films deposited by the hot wire cell method and its application to amorphous silicon solar cells

Thin Solid Films ◽

10.1016/s0040-6090(03)00132-9 ◽

2003 ◽

Vol 430 (1-2) ◽

pp. 274-277 ◽

Cited By ~ 24

Author(s):

Shinsuke Miyajima ◽

Akira Yamada ◽

Makoto Konagai

Keyword(s):

Silicon Carbide ◽

Solar Cells ◽

Amorphous Silicon ◽

Silicon Solar Cells ◽

Hot Wire ◽

Cell Method