Hydrogen evolution in hydrogenated microcrystalline silicon carbide thin films
2019 ◽
Vol 37
(3)
◽
pp. 031218
Keyword(s):
2001 ◽
Vol 11
(PR3)
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pp. Pr3-715-Pr3-722
◽
Keyword(s):
Keyword(s):
Keyword(s):
Low Temperature (320°C) Deposition of Hydrogenated Microcrystalline Cubic Silicon Carbide Thin Films
2004 ◽
Vol 457-460
◽
pp. 317-320
◽