Nanostructured silicon carbon thin films grown by plasma enhanced chemical vapour deposition technique

2013 ◽  
Vol 543 ◽  
pp. 27-31 ◽  
Author(s):  
U. Coscia ◽  
G. Ambrosone ◽  
D.K. Basa ◽  
V. Rigato ◽  
S. Ferrero ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Deposition Technique ◽  
Nanostructured Silicon ◽  
Silicon Carbon ◽  
Chemical Vapour Deposition Technique ◽  
Carbon Thin Films

Improved stability of intrinsic nanocrystalline Si thin films deposited by hot-wire chemical vapour deposition technique

2007 ◽  
Vol 515 (20-21) ◽  
pp. 8040-8044 ◽  
Author(s):  
S. Halindintwali ◽  
D. Knoesen ◽  
R. Swanepoel ◽  
B.A. Julies ◽  
C. Arendse ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Hot Wire ◽  
Deposition Technique ◽  
Chemical Vapour Deposition Technique ◽  
Improved Stability ◽  
Nanocrystalline Si
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