scholarly journals Structure of diamond and diamond like carbon thin films grown by hot-filament chemical vapour deposition technique

1996 ◽  
Vol 19 (3) ◽  
pp. 467-473 ◽  
Author(s):  
Nita Dilawar ◽  
Somna Sah ◽  
B R Mehta ◽  
V D Vankar
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Diamond Like Carbon ◽  
Deposition Technique ◽  
Chemical Vapour Deposition Technique ◽  
Carbon Thin Films ◽  
Hot Filament

XRD Studies on Residual Stress of the Diamond Films Grown Using Hot Filament Chemical Vapour Deposition Technique on Silicon Nitride and Tungsten Carbide Substrates

2013 ◽  
Vol 686 ◽  
pp. 325-330 ◽  
Author(s):  
Esah Hamzah ◽  
Tze Mi Yong ◽  
Kevin Chee Mun Fai
Keyword(s):  
Residual Stress ◽  
Silicon Nitride ◽  
Tungsten Carbide ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Diamond Films ◽  
Chemical Vapour ◽  
Deposition Technique ◽  
Chemical Vapour Deposition Technique ◽  
Hot Filament

This study analyses residual stress measurement using X-Ray diffraction method on ultrafine-polycrystalline diamonds and polycrystalline diamonds films grown using Hot Filament Chemical Vapour Deposition technique (HFCVD) on silicon nitride(Si3N4) and tungsten carbide (WC) substrates in the same chamber at the same time with varied pretreatments prior to HFCVD diamond deposition. Measurements were taken perpendicular to the surface and the measured residual stress states of the diamond films are in compression. Thus, assuming isotropic properties of the film, the diamond films grown have tension residual stress parallel to the surface of the substrate. Residual stress is estimated to have the lowest stress for substrate that has undergone 5g/liter silicon carbide seeding process. Effects of residual stress to adhesion are discussed for both substrates.

Improved stability of intrinsic nanocrystalline Si thin films deposited by hot-wire chemical vapour deposition technique

2007 ◽  
Vol 515 (20-21) ◽  
pp. 8040-8044 ◽  
Author(s):  
S. Halindintwali ◽  
D. Knoesen ◽  
R. Swanepoel ◽  
B.A. Julies ◽  
C. Arendse ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Hot Wire ◽  
Deposition Technique ◽  
Chemical Vapour Deposition Technique ◽  
Improved Stability ◽  
Nanocrystalline Si

A Study of Diamond-Like Carbon Thin Films Prepared by Microwave Plasma Chemical Vapour Deposition

2007 ◽  
Vol 9 (4) ◽  
pp. 444-447 ◽  
Author(s):  
Lai Xiuqiong ◽  
Chen Junfang ◽  
Fu Silie ◽  
Li Wei ◽  
Zhang Maoping ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition ◽  
Carbon Thin Films

Microwave plasma chemical vapour deposition of diamond like carbon thin films

1998 ◽  
Vol 278 (1-2) ◽  
pp. 130-134 ◽  
Author(s):  
D.S Patil ◽  
K Ramachandran ◽  
N Venkatramani ◽  
M Pandey ◽  
S Venkateswaran ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition ◽  
Carbon Thin Films
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