Effect of moving speed during in-line pulsed direct-current magnetron sputtering deposition on the structural and optical properties of Al-doped ZnO films

2017 ◽  
Vol 638 ◽  
pp. 144-152 ◽  
Author(s):  
Sung Yong Kim ◽  
Eou-Sik Cho ◽  
Sang Jik Kwon
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Zno Films ◽  
Structural And Optical Properties ◽  
Sputtering Deposition ◽  
Direct Current Magnetron Sputtering ◽  
Doped Zno ◽  
Pulsed Direct Current ◽  
Moving Speed

Structural and optical properties of thin zirconium oxide films prepared by reactive direct current magnetron sputtering

2002 ◽  
Vol 92 (7) ◽  
pp. 3599-3607 ◽  
Author(s):  
S. Venkataraj ◽  
Oliver Kappertz ◽  
Hansjörg Weis ◽  
Robert Drese ◽  
R. Jayavel ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Zirconium Oxide ◽  
Oxide Films ◽  
Structural And Optical Properties ◽  
Direct Current Magnetron Sputtering

Structural and optical properties of La-doped ZnO films prepared by magnetron sputtering

2007 ◽  
Vol 61 (11-12) ◽  
pp. 2262-2265 ◽  
Author(s):  
Wei Lan ◽  
Yanping Liu ◽  
Ming Zhang ◽  
Bo Wang ◽  
Hui Yan ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Zno Films ◽  
Structural And Optical Properties ◽  
Doped Zno ◽  
La Doped

Tungsten-doped ZnO transparent conducting films deposited by direct current magnetron sputtering

Vacuum ◽  
2010 ◽  
Vol 85 (2) ◽  
pp. 184-186 ◽  
Author(s):  
Huafu Zhang ◽  
Hanfa Liu ◽  
Chengxin Lei ◽  
Changkun Yuan ◽  
Aiping Zhou
Keyword(s):  
Magnetron Sputtering ◽  
Direct Current ◽  
Transparent Conducting Films ◽  
Transparent Conducting ◽  
Direct Current Magnetron Sputtering ◽  
Doped Zno
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