Passivation properties of HfO2-SiO2 Mixed Metal Oxide Thin Films with Low Reflectivity on Silicon Substrates for Semiconductor Devices

2021 ◽  
pp. 138965
Author(s):  
Abdullah Uzum ◽  
Imran Kanmaz
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Semiconductor Devices ◽  
Mixed Metal Oxide ◽  
Silicon Substrates ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Mixed Metal

Single source heterobimetallic precursors for the deposition of Cu–Ti mixed metal oxide thin films

2008 ◽  
pp. 1224 ◽  
Author(s):  
Asif Ali Tahir ◽  
Mazhar Hamid ◽  
Muhammad Mazhar ◽  
Matthias Zeller ◽  
Allen D. Hunter ◽  
...  
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Mixed Metal Oxide ◽  
Single Source ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Mixed Metal

Amorphous Mixed-Metal Oxide Thin Films from Aqueous Solution Precursors with Near-Atomic Smoothness

2016 ◽  
Vol 138 (51) ◽  
pp. 16800-16808 ◽  
Author(s):  
Matthew G. Kast ◽  
Elizabeth A. Cochran ◽  
Lisa J. Enman ◽  
Gavin Mitchson ◽  
Jeffrey Ditto ◽  
...  
Keyword(s):  
Thin Films ◽  
Aqueous Solution ◽  
Metal Oxide ◽  
Mixed Metal Oxide ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Mixed Metal

scholarly journals Nano Fabrication of Functional Transition Metal Oxide Thin Films

2008 ◽  
Vol 51 (1) ◽  
pp. 37-43
Author(s):  
Naoki SUZUKI ◽  
Hidekazu TANAKA ◽  
Yoshihiko YANAGISAWA ◽  
Satoru YAMANAKA ◽  
Luca PELLEGRINO ◽  
...  
Keyword(s):  
Thin Films ◽  
Transition Metal ◽  
Metal Oxide ◽  
Transition Metal Oxide ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Nano Fabrication ◽  
Functional Transition
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