3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography

2013 ◽  
Vol 132 ◽  
pp. 65-69 ◽  
Author(s):  
Ajay Kumar Kambham ◽  
Arul Kumar ◽  
Matthieu Gilbert ◽  
Wilfried Vandervorst
Keyword(s):  
Sample Preparation ◽  
Atom Probe Tomography ◽  
Atom Probe ◽  
Site Specific

Automated Sample Depth Targeting with Low kV Cleaning by Focused Ion Beam Microscopy for Atom Probe Tomography

2020 ◽  
Author(s):  
Woo Jun Kwon ◽  
Jisu Ryu ◽  
Christopher H. Kang ◽  
Michael B. Schmidt ◽  
Nicholas Croy
Keyword(s):  
Sample Preparation ◽  
Atom Probe Tomography ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Region Of Interest ◽  
Atom Probe ◽  
Sample Volume ◽  
Cleaning Process ◽  
Site Specific ◽  
Sample Depth

Abstract Focused ion beam (FIB) microscopy is an essential technique for the site-specific sample preparation of atom probe tomography (APT). The site specific APT and automated APT sample preparation by FIB have allowed increased APT sample volume. In the workflow of APT sampling, it is very critical to control depth of the sample where exact region of interest (ROI) for accurate APT analysis. Very precise depth control is required at low kV cleaning process in order to remove the damaged layer by previous high kV FIB process steps. We found low kV cleaning process with 5 kV and followed by 2kV beam conditions delivers better control to reached exact ROI on Z direction. This understanding is key to make APT sample with fully automated fashion.

Site-Specific Sample Preparation Method for Atom Probe Tomography on Semiconductor Devices

2020 ◽  
Author(s):  
Roger L. Alvis ◽  
Zdenek Kral ◽  
Trevan Landin ◽  
Jonathan Orsborn ◽  
Ty J. Prosa ◽  
...  
Keyword(s):  
Sample Preparation ◽  
Atom Probe Tomography ◽  
Semiconductor Device ◽  
Preparation Method ◽  
Atom Probe ◽  
Sample Preparation Method ◽  
Advanced Technique ◽  
Site Specific ◽  
Optimal Geometry ◽  
Lightly Doped Drain

Abstract An advanced technique for site-specific Atom Probe Tomography (APT) is presented. An APT sample is prepared from a targeted semiconductor device (commercially available product based on 14nm finFET technology). Using orthogonal views of the sample in STEM while FIB milling, a viable APT sample is created with the tip of the sample positioned over the lightly-doped drain (LDD) region of a pre-defined PFET. The resulting APT sample has optimal geometry and minimal amorphization damage.

Distribution of Alloying Elements within the Constituent Phases of a C-containing γ-TiAl Based Alloy studied by Atom Probe Tomography

2014 ◽  
Vol 1760 ◽  
Author(s):  
Thomas Klein ◽  
Francisca Mendez-Martin ◽  
Michael Schachermayer ◽  
Boryana Rashkova ◽  
Helmut Clemens ◽  
...  
Keyword(s):  
Sample Preparation ◽  
Atom Probe Tomography ◽  
Atom Probe ◽  
Solubility Limit ◽  
Major Elements ◽  
Alloying Elements ◽  
Site Specific ◽  
Close Vicinity ◽  
Nb Content

ABSTRACTThe distribution of alloying elements in the constituent phases of a C-containing γ-TiAl based alloy has been characterized locally by atom probe tomography. The major elements of the alloy under consideration – Ti, Al, Nb, and Mo – are distributed uniformly within each of the constituent phases. Furthermore, Mo is preferentially dissolved in the βo-phase, whereas Nb content is similar in all phases. The selected C concentration of the alloy is below the overall solubility limit as no precipitates have been observed. Therefore, C is enriched in the α2-phase, whereas the βo-phase is depleted of C. In addition, βo/γ-interfaces have been prepared by site specific sample preparation and characterized by atom probe tomography. Segregation of Mo and C into the interfaces and their close vicinity was observed.

Correlative Site-Specific Sample Preparation for Atom Probe Tomography on Complex Microstructures

2021 ◽  
pp. 1-10
Author(s):  
Lucía Paula Campo Schneider ◽  
Jenifer Barrirero ◽  
Christoph Pauly ◽  
Agustina Guitar ◽  
Frank Mücklich
Keyword(s):  
Sample Preparation ◽  
Atom Probe Tomography ◽  
Atom Probe ◽  
Site Specific

Abstract

scholarly journals Aggregated nanoparticles: Sample preparation and analysis by atom probe tomography

2020 ◽  
Vol 218 ◽  
pp. 113082
Author(s):  
Cédric Barroo ◽  
Austin J. Akey ◽  
David C. Bell
Keyword(s):  
Sample Preparation ◽  
Atom Probe Tomography ◽  
Atom Probe

scholarly journals High-Accuracy Sample Preparation for Three Dimensional Atom Probe Tomography Using Orthogonal Column Layout FIB-SEM and its STEM function

2018 ◽  
Vol 24 (S1) ◽  
pp. 830-831
Author(s):  
Miki Tsuchiya ◽  
Yoshihisa Orai ◽  
Takahiro Sato ◽  
Xin Man ◽  
Junichi Katane ◽  
...  
Keyword(s):  
Sample Preparation ◽  
Atom Probe Tomography ◽  
Three Dimensional ◽  
Atom Probe ◽  
High Accuracy

scholarly journals A method for site-specific and cryogenic specimen fabrication of liquid/solid interfaces for atom probe tomography

2018 ◽  
Vol 194 ◽  
pp. 89-99 ◽  
Author(s):  
D.K. Schreiber ◽  
D.E. Perea ◽  
J.V. Ryan ◽  
J.E. Evans ◽  
J.D. Vienna
Keyword(s):  
Atom Probe Tomography ◽  
Atom Probe ◽  
Site Specific

scholarly journals Atom Probe Tomography for Catalysis Applications: A Review

2019 ◽  
Vol 9 (13) ◽  
pp. 2721 ◽  
Author(s):  
Cédric Barroo ◽  
Austin J. Akey ◽  
David C. Bell
Keyword(s):  
Sample Preparation ◽  
Atom Probe Tomography ◽  
Ion Beam ◽  
3D Structure ◽  
Atom Probe ◽  
Atomic Scale ◽  
High Mass ◽  
Preparation Methods ◽  
Catalytic Materials ◽  
Sample Preparation Methods

Atom probe tomography is a well-established analytical instrument for imaging the 3D structure and composition of materials with high mass resolution, sub-nanometer spatial resolution and ppm elemental sensitivity. Thanks to recent hardware developments in Atom Probe Tomography (APT), combined with progress on site-specific focused ion beam (FIB)-based sample preparation methods and improved data treatment software, complex materials can now be routinely investigated. From model samples to complex, usable porous structures, there is currently a growing interest in the analysis of catalytic materials. APT is able to probe the end state of atomic-scale processes, providing information needed to improve the synthesis of catalysts and to unravel structure/composition/reactivity relationships. This review focuses on the study of catalytic materials with increasing complexity (tip-sample, unsupported and supported nanoparticles, powders, self-supported catalysts and zeolites), as well as sample preparation methods developed to obtain suitable specimens for APT experiments.

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