Inversion of surface damage and residual stress in ground silicon wafers by laser surface acoustic wave technology

Ultrasonics ◽  
2021 ◽  
Vol 113 ◽  
pp. 106367
Author(s):  
Zaiwei Liu ◽  
Bin Lin ◽  
Xiaohu Liang ◽  
Anyao Du
Keyword(s):  
Residual Stress ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Surface Damage ◽  
Silicon Wafers ◽  
Laser Surface ◽  
Wave Technology

Surface acoustic wave technology for poisson ratio sensors

1998 ◽  
Vol 64 (2) ◽  
pp. 133-136
Author(s):  
J. Alekna ◽  
R. Miškinis ◽  
P. Rutkowski ◽  
E. Urba
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Poisson Ratio ◽  
Wave Technology

scholarly journals A Prototype Antibody-based Biosensor for Measurement of Salivary MMP-8 in Periodontitis using Surface Acoustic Wave Technology

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
John J. Taylor ◽  
Katrin M. Jaedicke ◽  
Rachel C. van de Merwe ◽  
Susan M. Bissett ◽  
Nichola Landsdowne ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Wave Technology
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