Study of Low-residual Stress Amorphous Film Deposition Method for LiTaO3/Quartz or LiNbO3/Quartz Bonding toward 5G Surface Acoustic Wave Devices

2019 ◽  
Author(s):  
Ami Tezuka ◽  
Hiroyuki Kuwae ◽  
Kosuke Yamada ◽  
Shuichi Shoji ◽  
Shoji Kakio ◽  
...  
Keyword(s):  
Residual Stress ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Amorphous Film ◽  
Film Deposition ◽  
Deposition Method ◽  
Acoustic Wave Devices

scholarly journals Low-Residual-Stress Amorphous Film for LiTaO3/Quartz or LiNbO3/Quartz Bonding toward 5G Surface Acoustic Wave Devices

2020 ◽  
Vol 13 (0) ◽  
pp. E19-009-1-E19-009-7
Author(s):  
Ami Tezuka ◽  
Hiroyuki Kuwae ◽  
Kosuke Yamada ◽  
Shuichi Shoji ◽  
Shoji Kakio ◽  
...  
Keyword(s):  
Residual Stress ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Amorphous Film ◽  
Acoustic Wave Devices

scholarly journals Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

2017 ◽  
Vol 9 (28) ◽  
pp. 4112-4134 ◽  
Author(s):  
David B. Go ◽  
Massood Z. Atashbar ◽  
Zeinab Ramshani ◽  
Hsueh-Chia Chang
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Chemical Sensing ◽  
Chemical Detection ◽  
Microfluidic Platforms ◽  
Acoustic Wave Sensors ◽  
Acoustic Wave Devices ◽  
Wave Sensors

Surface acoustic wave sensors and microfluidic platforms enable effective chemical detection and sample manipulation.

Sign in / Sign up

Export Citation Format

Share Document