Amorphous SiCN diaphragm for transmission electron microscope with environmental-cell fabricated by plasma-enhanced chemical vapor deposition

Vacuum ◽  
2013 ◽  
Vol 88 ◽  
pp. 83-87 ◽  
Author(s):  
Takaomi Matsutani ◽  
Kayo Yamasaki ◽  
Hidenori Tsutsui ◽  
Takuya Miura ◽  
Tadahiro Kawasaki
2021 ◽  
Vol 27 (S2) ◽  
pp. 25-26
Author(s):  
Jean-Luc Maurice ◽  
Pavel Bulkin ◽  
Éric Ngo ◽  
Weixi Wang ◽  
Pere Roca i Cabarrocas ◽  
...  

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