Plasma-Enhanced Chemical Vapor Deposition in a Transmission Electron Microscope?

Microscopy and Microanalysis ◽

10.1017/s143192762101312x ◽

2021 ◽

Vol 27 (S2) ◽

pp. 25-26

Author(s):

Jean-Luc Maurice ◽

Pavel Bulkin ◽

Éric Ngo ◽

Weixi Wang ◽

Pere Roca i Cabarrocas ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Electron Microscope ◽

Transmission Electron Microscope ◽

Vapor Deposition ◽

Chemical Vapor ◽

Transmission Electron

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In situ, real‐time observation of Al chemical‐vapor deposition on SiO2 in an environmental transmission electron microscope

Journal of Applied Physics ◽

10.1063/1.357877 ◽

1994 ◽

Vol 76 (12) ◽

pp. 8198-8200 ◽

Author(s):

Jeff Drucker ◽

Renu Sharma ◽

Karl Weiss ◽

John Kouvetakis

Keyword(s):

Chemical Vapor Deposition ◽

Electron Microscope ◽

Real Time ◽

Transmission Electron Microscope ◽

Vapor Deposition ◽

Chemical Vapor ◽

Transmission Electron ◽

Time Observation ◽

Real Time Observation

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Synthesis of Graphene Using Thermal Chemical Vapor Deposition and Application as a Grid Membrane for Transmission Electron Microscope Observation

Korean Journal of Materials Research ◽

10.3740/mrsk.2012.22.3.130 ◽

2012 ◽

Vol 22 (3) ◽

pp. 130-135

Author(s):

Byeong-Joo Lee ◽

Goo-Hwan Jeong

Keyword(s):

Chemical Vapor Deposition ◽

Electron Microscope ◽

Transmission Electron Microscope ◽

Vapor Deposition ◽

Chemical Vapor ◽

Microscope Observation ◽

Electron Microscope Observation ◽

Thermal Chemical Vapor Deposition ◽

Transmission Electron Microscope Observation ◽

Transmission Electron

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Transmission Electron Microscope Study of In Situ Polycrystalline Si Film Grown by Catalyzer-Enhanced Chemical Vapor Deposition

Journal of The Electrochemical Society ◽

10.1149/1.2422871 ◽

2007 ◽

Vol 154 (3) ◽

pp. J73 ◽

Author(s):

Han-Ki Kim ◽

Myung Soo Kim ◽

Jeong-Woo Park ◽

Woon Jo Cho

Keyword(s):

Chemical Vapor Deposition ◽

Electron Microscope ◽

Transmission Electron Microscope ◽

Vapor Deposition ◽

Microscope Study ◽

Electron Microscope Study ◽

Chemical Vapor ◽

Transmission Electron ◽

Transmission Electron Microscope Study

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High-resolution transmission electron microscope observations of multiwalled carbon nanotube microstructures grown by plasma enhanced chemical vapor deposition

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4804543 ◽

2013 ◽

Vol 31 (3) ◽

pp. 031805 ◽

Author(s):

Mireille Gaillard ◽

Christian Kübel ◽

Chantal Boulmer-Leborgne ◽

Di Wang ◽

Nadjib Semmar ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Electron Microscope ◽

Carbon Nanotube ◽

High Resolution ◽

Transmission Electron Microscope ◽

Vapor Deposition ◽

Chemical Vapor ◽

Multiwalled Carbon Nanotube ◽

Multiwalled Carbon ◽

Transmission Electron

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Development of B-C-N-O Diaphragm for Environmental Cell Transmission Electron Microscope by Plasma Enhanced Chemical Vapor Deposition

10.1063/1.3508546 ◽

2010 ◽

Author(s):

Hidenori Tsutsui ◽

Takaomi Matsutani ◽

Tadahiro Kawasaki ◽

Akira Kobayashi ◽

Josef Krasa ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Electron Microscope ◽

Transmission Electron Microscope ◽

Vapor Deposition ◽

Chemical Vapor ◽

Transmission Electron ◽

Environmental Cell ◽

Cell Transmission

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Nanoscale electron stimulated chemical vapor deposition of Au in an environmental transmission electron microscope

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.2122847 ◽

2005 ◽

Vol 23 (6) ◽

pp. 2403 ◽

Author(s):

Sutharsan Ketharanathan ◽

Renu Sharma ◽

Jeff Drucker

Keyword(s):

Chemical Vapor Deposition ◽

Electron Microscope ◽

Transmission Electron Microscope ◽

Vapor Deposition ◽

Chemical Vapor ◽

Environmental Transmission ◽

Transmission Electron

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In-situ Observation on Electron Beam Induced Chemical Vapor Deposition by Transmission Electron Microscope

10.7567/ssdm.1987.b-8-2ln ◽

1987 ◽

Author(s):

Toshinari Ichihashi ◽

Shinji Matsui

Keyword(s):

Electron Beam ◽

Chemical Vapor Deposition ◽

Electron Microscope ◽

Transmission Electron Microscope ◽

Vapor Deposition ◽

Chemical Vapor ◽

In Situ Observation ◽

Transmission Electron

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In situ, real‐time observation of Al chemical‐vapor deposition on SiO2 in an environmental transmission electron microscope

Journal of Applied Physics ◽

10.1063/1.358699 ◽

1995 ◽

Vol 77 (6) ◽

pp. 2846-2848 ◽

Author(s):

Jeff Drucker ◽

Renu Sharma ◽

Karl Weiss ◽

John Kouvetakis

Keyword(s):

Chemical Vapor Deposition ◽

Electron Microscope ◽

Real Time ◽

Transmission Electron Microscope ◽

Vapor Deposition ◽

Chemical Vapor ◽

Transmission Electron ◽

Time Observation ◽

Real Time Observation

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Amorphous silicon carbonitride diaphragm for environmental-cell transmission electron microscope fabricated by low-energy ion beam induced chemical vapor deposition

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2015.08.011 ◽

2015 ◽

Vol 365 ◽

pp. 150-154 ◽

Author(s):

Takaomi Matsutani ◽

Kayo Yamasaki ◽

Norihiro Imaeda ◽

Tadahiro Kawasaki

Keyword(s):

Chemical Vapor Deposition ◽

Electron Microscope ◽

Transmission Electron Microscope ◽

Vapor Deposition ◽

Ion Beam ◽

Chemical Vapor ◽

Silicon Carbonitride ◽

Transmission Electron ◽

Environmental Cell

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Amorphous SiCN diaphragm for transmission electron microscope with environmental-cell fabricated by plasma-enhanced chemical vapor deposition

Vacuum ◽

10.1016/j.vacuum.2012.03.033 ◽

2013 ◽

Vol 88 ◽

pp. 83-87 ◽

Author(s):

Takaomi Matsutani ◽

Kayo Yamasaki ◽

Hidenori Tsutsui ◽

Takuya Miura ◽

Tadahiro Kawasaki

Keyword(s):

Chemical Vapor Deposition ◽

Electron Microscope ◽

Transmission Electron Microscope ◽

Vapor Deposition ◽

Chemical Vapor ◽

Transmission Electron ◽

Environmental Cell

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