Effects of RF power variation on properties of ZnO thin films and electrical properties of p–n homojunction

2003 ◽  
Vol 254 (3-4) ◽  
pp. 449-455 ◽  
Author(s):  
Deuk-Kyu Hwang ◽  
Kyu-Hyun Bang ◽  
Min-Chang Jeong ◽  
Jae-Min Myoung
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Zno Thin Films ◽  
Rf Power ◽  
Power Variation

Effects of RF power variation on properties of N-doped p-type ZnO thin films grown by plasma-assisted MOCVD

2007 ◽  
Vol 29 (12) ◽  
pp. 1612-1615 ◽  
Author(s):  
Yangfan Lu ◽  
Zhizhen Ye ◽  
Yujia Zeng ◽  
Weizhong Xu ◽  
Liping Zhu ◽  
...  
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Rf Power ◽  
Power Variation ◽  
P Type

Structural Properties of Deposited ZnO Thin Films on Flexible Substrates at Various Substrate Temperatures and RF Power

2012 ◽  
Vol 576 ◽  
pp. 598-601
Author(s):  
Nur Sa’adah Muhamad Sauki ◽  
Sukreen Hana Herman ◽  
Hanafi Ani Mohd ◽  
Rusop Mahmood Mohamad
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Substrate Temperature ◽  
Deposition Rate ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Films ◽  
Flexible Substrates ◽  
Rf Power ◽  
Sem Images ◽  
Substrate Temperatures

ZnO thin films were deposited on Teflon substrates by RF magnetron sputtering at different substrate temperature and different RF power. In this work, we investigated the dependence of the deposition rate and also the ZnO physical and electrical properties on the substrate temperature and RF power. It is observed that the deposition rate increased as the temperature and RF power increased. FE-SEM images confirmed that microstructure of the thin films consists of nanoparticles. XRD data confirmed that the ZnO thin films at various RF power and substrate temperature have (002) structure.

Effect of O2partial pressure on optical and electrical properties in Al doped ZnO thin films

2014 ◽  
Vol 29 (5) ◽  
pp. 275-280 ◽  
Author(s):  
P. J. Cao ◽  
W. J. Liu ◽  
F. Jia ◽  
Y. X. Zeng ◽  
D. L. Zhu ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Zno Thin Films ◽  
Optical And Electrical Properties ◽  
Doped Zno
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