Crystalline silicon films grown by pulsed dc magnetron sputtering

2002 ◽  
Vol 299-302 ◽  
pp. 128-132 ◽  
Author(s):  
Peter Reinig ◽  
Frank Fenske ◽  
Walther Fuhs ◽  
Burkhardt Selle
Keyword(s):  
Magnetron Sputtering ◽  
Crystalline Silicon ◽  
Silicon Films ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

High rate amorphous and crystalline silicon formation by pulsed DC magnetron sputtering deposition for photovoltaics

2014 ◽  
Vol 212 (1) ◽  
pp. 42-46 ◽  
Author(s):  
Louise R. Bailey ◽  
Gary Proudfoot ◽  
Brodie Mackenzie ◽  
Niels Andersen ◽  
Arne Karlsson ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Crystalline Silicon ◽  
High Rate ◽  
Dc Magnetron Sputtering ◽  
Sputtering Deposition ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Characterization of Ti–Zr–V thin films deposited by DC and unipolar pulsed DC magnetron sputtering

Vacuum ◽  
2021 ◽  
Vol 188 ◽  
pp. 110200
Author(s):  
Sihui Wang ◽  
Wei Wei ◽  
Yonghao Gao ◽  
Haibin Pan ◽  
Yong Wang
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Effects of sputtering power toward the Al-doped ZnO thin Film prepared by pulsed DC magnetron sputtering

2017 ◽  
Vol 4 (5) ◽  
pp. 6466-6471 ◽  
Author(s):  
Kittikhun Seawsakul ◽  
Mati Horprathum ◽  
Pitak Eiamchai ◽  
Viyapol Pattantsetakul ◽  
Saksorn Limwichean ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Zno Thin Film ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Sputtering Power ◽  
Doped Zno ◽  
Pulsed Dc Magnetron Sputtering
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