Influence of the Duty Cycle of Pulsed DC Magnetron Sputtering on ITO Films for Amorphous/Crystalline Silicon Heterojunction Solar Cells

2017 ◽  
Vol 17 (5) ◽  
pp. 3021-3025
Author(s):  
Sunbo Kim ◽  
YoungKuk Kim ◽  
Anh Huy Tuan Le ◽  
Yongjun Kim ◽  
Shihyun Ahn ◽  
...  
Keyword(s):  
Solar Cells ◽  
Magnetron Sputtering ◽  
Duty Cycle ◽  
Crystalline Silicon ◽  
Dc Magnetron Sputtering ◽  
Heterojunction Solar Cells ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering ◽  
Silicon Heterojunction Solar Cells ◽  
Ito Films

Crystalline silicon films grown by pulsed dc magnetron sputtering

2002 ◽  
Vol 299-302 ◽  
pp. 128-132 ◽  
Author(s):  
Peter Reinig ◽  
Frank Fenske ◽  
Walther Fuhs ◽  
Burkhardt Selle
Keyword(s):  
Magnetron Sputtering ◽  
Crystalline Silicon ◽  
Silicon Films ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

High rate amorphous and crystalline silicon formation by pulsed DC magnetron sputtering deposition for photovoltaics

2014 ◽  
Vol 212 (1) ◽  
pp. 42-46 ◽  
Author(s):  
Louise R. Bailey ◽  
Gary Proudfoot ◽  
Brodie Mackenzie ◽  
Niels Andersen ◽  
Arne Karlsson ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Crystalline Silicon ◽  
High Rate ◽  
Dc Magnetron Sputtering ◽  
Sputtering Deposition ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering
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