Photolytic absorbate removal during the growth of aluminium nitride by remote microwave plasma chemical vapour deposition
1997 ◽
Vol 41
(2)
◽
pp. 305-314
◽
2001 ◽
Vol 142-144
◽
pp. 314-320
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1991 ◽
Vol 47
(1-3)
◽
pp. 13-21
◽
2007 ◽
Vol 61
(11-12)
◽
pp. 2243-2246
◽
2012 ◽
Vol 42
(11)
◽
pp. 959-960
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