PECVD of amorphous TiO2 thin films: effect of growth temperature and plasma gas composition
2000 ◽
Vol 371
(1-2)
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pp. 126-131
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2007 ◽
Vol 50
(6)
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pp. 1827
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2015 ◽
Vol 41
(7)
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pp. 9177-9182
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2018 ◽
Vol 706
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pp. 477-482
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2019 ◽
Vol 129
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pp. 217-226
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2013 ◽
Vol 117
(44)
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pp. 22497-22508
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