Characterization of ternary boron carbon nitride films synthesized by RF magnetron sputtering

2004 ◽  
Vol 447-448 ◽  
pp. 192-196 ◽  
Author(s):  
Dong Ho Kim ◽  
Eungsun Byon ◽  
Sunghun Lee ◽  
Jong-Kuk Kim ◽  
Hyun Ruh
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Nitride ◽  
Rf Magnetron Sputtering ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Deposition of boron carbon nitride films by dual cathode magnetron sputtering

1999 ◽  
Vol 343-344 ◽  
pp. 250-253 ◽  
Author(s):  
Y. Kusano ◽  
J.E. Evetts ◽  
I.M. Hutchings
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Nitride ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Characterization of boron carbon nitride film for humidity sensor

2007 ◽  
Vol 16 (4-7) ◽  
pp. 1300-1303 ◽  
Author(s):  
Hidemitsu Aoki ◽  
Hidekazu Shima ◽  
Chiharu Kimura ◽  
Takashi Sugino
Keyword(s):  
Carbon Nitride ◽  
Humidity Sensor ◽  
Nitride Film ◽  
Carbon Nitride Film ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Characterization of boron carbon nitride film modified by excimer laser annealing

2007 ◽  
Vol 254 (2) ◽  
pp. 596-599 ◽  
Author(s):  
Hidemitsu Aoki ◽  
Kazutoshi Ohyama ◽  
Hiroshi Sota ◽  
Toshiaki Seino ◽  
Chiharu Kimura ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Carbon Nitride ◽  
Laser Annealing ◽  
Nitride Film ◽  
Excimer Laser Annealing ◽  
Carbon Nitride Film ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Electrochemical properties of boron–carbon–nitride films formed by magnetron sputtering

2006 ◽  
Vol 51 (13) ◽  
pp. 2662-2668 ◽  
Author(s):  
Eungsun Byon ◽  
Myungsook Son ◽  
Koo-Hyun Lee ◽  
Kee-Seok Nam ◽  
Nobuyoshi Hara ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Electrochemical Properties ◽  
Carbon Nitride ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering

2006 ◽  
Vol 252 (12) ◽  
pp. 4185-4189 ◽  
Author(s):  
Lihua Liu ◽  
Yuxin Wang ◽  
Kecheng Feng ◽  
Yingai Li ◽  
Weiqing Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Carbon Nitride ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Corrosion behavior of boron-carbon-nitride films grown by magnetron sputtering

2004 ◽  
Vol 447-448 ◽  
pp. 197-200 ◽  
Author(s):  
Eungsun Byon ◽  
Myungsook Son ◽  
Nobuyoshi Hara ◽  
Katsuhisa Sugimoto
Keyword(s):  
Magnetron Sputtering ◽  
Corrosion Behavior ◽  
Carbon Nitride ◽  
Boron Carbon Nitride ◽  
Boron Carbon
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