Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering

2006 ◽  
Vol 252 (12) ◽  
pp. 4185-4189 ◽  
Author(s):  
Lihua Liu ◽  
Yuxin Wang ◽  
Kecheng Feng ◽  
Yingai Li ◽  
Weiqing Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Carbon Nitride ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Effect of CxNyMolecular Species on Carbon Nitride Thin Films Deposited by Radio Frequency Magnetron Sputtering

2008 ◽  
Vol 47 (11) ◽  
pp. 8530-8533 ◽  
Author(s):  
Kimin Roh ◽  
Byung-Keun Na ◽  
Si-Kyoung Choi ◽  
Jung-Hyung Kim ◽  
Dae-Jin Seong ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Carbon Nitride ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

Nitrogen Doping into Cu2O Thin Films Deposited by Reactive Radio-Frequency Magnetron Sputtering

2001 ◽  
Vol 40 (Part 1, No. 4B) ◽  
pp. 2765-2768 ◽  
Author(s):  
Shogo Ishizuka ◽  
Shinya Kato ◽  
Takahiro Maruyama ◽  
Katsuhiro Akimoto
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Nitrogen Doping ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Cu2o Thin Films

scholarly journals Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries

2016 ◽  
Vol 307 ◽  
pp. 684-689 ◽  
Author(s):  
S. Lobe ◽  
C. Dellen ◽  
M. Finsterbusch ◽  
H.-G. Gehrke ◽  
D. Sebold ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid State ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Solid State Batteries
Sign in / Sign up

Export Citation Format

Share Document